Partitioned Optical Path for Precise Laser Surface Processing

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Solution Overview

Problem

Existing processing apparatuses struggle to efficiently form structures on objects by irradiating them with processing lights, often resulting in incomplete or inaccurate surface modifications.

Innovation Solution

A processing apparatus equipped with a light irradiation system that includes a partition member to contain the optical path between the object's surface and the light irradiation apparatus, allowing for precise control of the processing light's path and ensuring effective surface modification.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a processing apparatus irradiates a surface of an object with a processing light to form a structure, then the surface resistance is reduced, but the structure formation accuracy and precision deteriorate due to uncontrolled light scattering and substance interference in the optical path

Engineering Contradiction:
Improvestructure formation accuracyVSAvoidlight scattering and substance interference
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The optical path space is segmented and isolated from the external environment using a partition member (housing structure), creating a controlled processing chamber that prevents unauthorized substance entry while maintaining the laser processing function

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A partition member acts as an intermediary barrier between the optical path and the external environment, allowing necessary substances (processing light) to pass through while blocking harmful factors (unauthorized substances, scattered light)

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 3:

The partition member creates an inert/controlled atmosphere within the optical path space, isolating the processing area from environmental contaminants and maintaining optimal conditions for laser processing

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

2Productivity

If the processing light is irradiated without containing the optical path, then the device complexity is reduced, but the processing efficiency and productivity deteriorate due to incomplete surface modification and material removal errors

Engineering Contradiction:
Improveprocessing efficiencyVSAvoidoptical path containment structure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The optical path is segmented and enclosed within a housing structure, creating distinct functional zones that improve processing control and efficiency while maintaining reasonable device complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The partition member serves multiple functions simultaneously: it contains the optical path, blocks scattered light, prevents substance interference, and provides structural support, thereby improving productivity without proportionally increasing device complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus achieves precise and efficient surface modification by ensuring that the processing light is focused and contained, leading to improved structural formation and reduced material removal or addition errors.

Implementation Method 1

a light irradiation apparatus that irradiates a surface of an object with processing light

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS20250162073A1Processing apparatus, and manufacturing method of movable body
Publication Date: 2025.05.22 NIKON CORP
  • US20250162073A1 patent drawing
  • US20250162073A1 patent drawing
  • US20250162073A1 patent drawing

AI summary

A processing apparatus has: a light irradiation apparatus that includes an optical system and that processes a surface of an object by irradiating the surface of the object with processing light emitted from the optical system; a partition member that surrounds a space including an optical path between the surface of the object and an optical member that is disposed at a most object side in the optical system; a partition support apparatus that supports the partition member and that does not contact the object; and a controller.