Partitioned Optical Path for Precise Laser Surface Structuring

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Solution Overview

Problem

Existing processing apparatuses struggle to effectively form structures on objects by irradiating them with processing lights, often resulting in incomplete or inaccurate surface modifications.

Innovation Solution

The proposed processing apparatus incorporates a light irradiation system with a partition member that surrounds the optical path between the object's surface and the optical member, allowing for precise control of the processing light's path and ensuring that the light is focused on the intended area.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a processing light is irradiated onto a surface to form a structure, then the surface resistance is reduced and structure formation is achieved, but the positioning accuracy and structural precision are insufficient

Engineering Contradiction:
Improvestructure formation precisionVSAvoidpositioning accuracy
Core Design Contradiction:
Manufacturing precisionVSMeasurement precision

Solution Approach 1:

The patent introduces a partition member that divides the processing space into multiple regions, including a light irradiation region and a substance collection region. This segmentation prevents processed substances from interfering with the optical path and positioning systems, thereby improving both structure formation precision and positioning accuracy simultaneously

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The partition member acts as an intermediary element between the light irradiation area and the substance generation area. It allows the processing light to pass through while blocking and directing the processed substances away from the optical path, thus maintaining high precision in both positioning and structure formation without requiring complex additional systems

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If processing light is used to form structures on object surfaces, then material removal or thickness modification is achieved, but substances generated by irradiation interfere with the optical path and reduce processing accuracy

Engineering Contradiction:
Improvesurface structure formationVSAvoidoptical path interference
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The partition member extracts and isolates the harmful substances generated during light irradiation processing. By creating a separate collection region for these substances, the system removes the interference factor from the optical path while maintaining the beneficial effects of the processing light on the object surface

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The partition member is positioned to preemptively block and redirect substances before they can enter the optical path. This preliminary action prevents optical interference from occurring, ensuring continuous high-precision processing without the need for complex real-time correction systems

Inventive Principle:
Principle #9Preliminary anti-action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables the formation of precise structures on the object's surface by adjusting the thickness of parts or removing material through targeted irradiation, improving the accuracy and effectiveness of the processing operation.

Implementation Method 1

a light irradiation apparatus that irradiates a surface of an object with processing light

Methodology Applied
Scientific EffectLaser irradiation: Laser

Implementation Method 2

forms a structure at the surface of the object by removing a part of the object by an irradiation of the processing light

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS12208469B2Processing apparatus and method using irradiation apparatus having a partition member
Publication Date: 2025.01.28 NIKON CORP
  • US12208469B2 patent drawing
  • US12208469B2 patent drawing
  • US12208469B2 patent drawing

AI summary

A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a partition member that surrounds a space including an optical path between the surface of the object and an optical member that is disposed at the most object side in an optical system of the light irradiation apparatus that allows the processing light to pass therethrough.