Anti-contamination Flange for Parylene Deposition
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Vacuum deposition machines for Parylene face challenges in temperature management, leading to increased chamber and part temperatures, reduced vapor condensation, and frequent seal replacement due to inadequate heating of seals and joints, resulting in Parylene film tearing and pollution.
Innovation Solution
A connection device with heating means for the gasket housing and insulation to limit heat conduction, featuring recesses and thin walls to isolate the vacuum cavity, along with neutral gas injection to prevent Parylene deposition on seals, ensuring controlled temperature and reduced contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If heating means are applied to prevent condensation on flange joints, then seal heating is improved, but chamber temperature rises and vapor condensation decreases
Solution Approach 1:
The heating means are segmented into localized heating zones at the flange joints and seal areas, rather than heating the entire chamber. This allows targeted heating of specific components without raising the overall chamber temperature, maintaining vapor condensation efficiency while preventing seal condensation.
Solution Approach 2:
The patent applies local quality by providing heating means specifically at the flange joints and seal locations where condensation is problematic, rather than uniform heating throughout the chamber. This localized approach ensures seals remain warm enough to prevent condensation while the bulk chamber maintains low temperature for efficient vapor deposition.
2Object-affected harmful factors
If flange joints are heated to prevent Parylene deposition, then seal contamination is reduced, but heat conduction to vacuum cavity increases
Solution Approach 1:
The patent introduces an intermediary insulating structure between the heated flange joints and the vacuum cavity. This intermediate layer acts as a thermal barrier, allowing the flange joints to be heated for condensation prevention while blocking heat conduction to the cavity, thus avoiding unnecessary energy loss and maintaining deposition efficiency.
Solution Approach 2:
The patent extracts the heating function from the main chamber and isolates it to specific flange joint locations using insulating structures. By separating the heating zone from the deposition zone through insulation, the system can maintain warm seals without transferring heat to the vacuum cavity, preventing both contamination and energy waste.
3Reliability
If heating means are applied to flange joints, then condensation is prevented, but device complexity increases
Solution Approach 1:
The patent employs simple, inexpensive heating elements such as heating wires or flexible heating bands that can be easily installed and replaced on flange joints. These disposable or easily replaceable components provide reliable seal heating without requiring complex control systems or expensive equipment, maintaining simplicity while improving reliability.
Solution Approach 2:
The heating means are designed to be self-regulating or easily controllable through simple temperature sensors, allowing the system to maintain optimal seal temperature automatically. This self-service capability reduces the need for complex manual control systems while ensuring consistent seal performance and preventing condensation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution maintains a stable temperature between -20°C and 50°C, reducing Parylene film tearing and pollution, enhancing deposition quality and reducing maintenance costs by avoiding heat conduction and film formation at seals and joints.
Implementation Method 1
the heating means are arranged to heat the gasket housing
Implementation Method 2
the device further comprises insulation means arranged to limit heat conduction from the heating means to the vacuum cavity
Implementation Method 3
the deposition rate decreases as the temperature increases... significantly reduced vapor condensation
Data Source
Figure 1
Figure 2
Figure 3
AI summary
Connection device (10) for vacuum deposition machine (20), the machine (20) comprising a first part (121) and a second part (21) to be connected together by the flange (10) to form a vacuum cavity, the device (10) comprising: - heating means, - a flange gasket, - a first connection portion (13a) and a second connection portion arranged to be connected together, and one or the other of said connection portions (13a, 13b) comprises a gasket housing arranged to receive the flange gasket, characterized in that: - the heating means are arranged to heat the gasket housing, and the device (10) further comprises means arranged to limit thermal conduction from the heating means to the cavity.