Passive Vacuum Pump for Semiconductor Wafer Transport
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Solution Overview
Problem
Current vacuum transfer pod systems fail to maintain low pressure during transportation of semiconductor wafers, leading to exposure of sensitive memory devices like MRAM and PCM to contaminants, which can cause device failure due to rapid pressure increase when active vacuum pumping is turned off.
Innovation Solution
A portable vacuum transfer pod equipped with a passively capable vacuum pump that maintains ultra-high vacuum conditions (less than 1×10−3 Torr) without the need for a power source, allowing for extended storage and transportation of wafers under vacuum, using a getter or sorption pump that continues to pump gas even after power is removed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If active vacuum pumping is turned off during transportation, then the portable vacuum transfer pod can be moved without power dependency, but the pressure increases rapidly causing exposure to contaminants
Solution Approach 1:
The vacuum pump is designed to maintain ultra-high vacuum conditions passively without requiring external power during transportation. The pump system automatically continues pumping based on its inherent mechanical properties, eliminating the need for power sources while maintaining vacuum integrity throughout the transportation period.
Solution Approach 2:
The vacuum pump is oversized relative to the chamber volume, providing excessive pumping capacity that ensures vacuum maintenance even during transportation. This over-engineering approach guarantees that the pump can handle any potential pressure increases and maintain ultra-high vacuum conditions without requiring active control or power input.
2Reliability
If integrated processing is implemented for MRAM and PCM devices, then device yield and performance improve, but the requirement for continuous ultra-high vacuum during storage and transport becomes more critical
Solution Approach 1:
The vacuum transfer pod maintains an ultra-high vacuum environment (less than 1×10^-3 Torr) that serves as an inert atmosphere, preventing chemical reactions between sensitive MRAM and PCM devices and contaminant gases such as moisture and oxygen. This inert environment protects devices during storage and transportation, eliminating the need for rapid processing and enabling integrated manufacturing approaches.
3Adaptability or versatility
If conventional vacuum transfer pods are used, then wafers can be transported, but pressure increases rapidly causing device failure
Solution Approach 1:
The vacuum pump system is designed to autonomously maintain ultra-high vacuum conditions without requiring external power or control systems during transportation. This self-service capability ensures that the pump continues to remove gases and maintain pressure below 1×10^-3 Torr throughout the entire transportation period, protecting sensitive devices from contaminant exposure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces the exposure of wafers to contaminants, enabling the storage of sensitive memory devices for several days without degradation, as the passively capable vacuum pump maintains ultra-high vacuum conditions for an extended period, preventing damage from moisture, oxygen, and other gases.
Implementation Method 1
A passively capable vacuum pump capable of passive vacuum pumping is in fluid connection with the internal wafer storage chamber
Implementation Method 2
using a getter or sorption pump that continues to pump gas even after power is removed
Implementation Method 3
using a getter or sorption pump that continues to pump gas even after power is removed
Data Source
AI summary
An apparatus for transporting or storing at least one semiconductor wafer in an ultra-high vacuum is provided. A portable vacuum transfer pod is provided comprising an internal wafer storage chamber for storing one or more wafers and a wafer support for supporting at least one wafer within the internal wafer storage chamber. A passively capable vacuum pump capable of passive vacuum pumping is in fluid connection with the internal wafer storage chamber and is mechanically connected to the portable vacuum transfer pod. A shut off valve for opening and closing the fluid connection is between the passively capable vacuum pump and the internal wafer storage chamber.