Passive Wireless MEMS Resonator Assembly for Multi-Quantity Sensing
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Solution Overview
Problem
Existing passive wireless electronic components face limitations such as small reading distances, environmental sensitivity, and imprecise measurements due to environmental conditions, particularly in LC resonant circuit sensors, acoustic wave sensors, and electromagnetic transduction sensors.
Innovation Solution
A passive wireless electronic component with multiple non-linearly actuated resonant micro-electromechanical components (MEMS) on a single antenna, each with distinct resonant frequencies, allowing for precise measurement of multiple physical quantities by differentiating resonant responses to incident electromagnetic signals.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple MEMS resonators are used to measure multiple physical quantities, then measurement versatility is improved, but device bulk increases considerably
Solution Approach 1:
The patent combines multiple MEMS resonators with different resonant frequencies onto a single antenna structure. The antenna serves as a common platform that can excite and read multiple resonators simultaneously, merging what would traditionally be separate sensor units into one integrated device, thereby reducing overall bulk while maintaining the ability to measure multiple physical quantities
Solution Approach 2:
The single antenna is designed to be universal in its functionality, capable of interacting with multiple types of MEMS resonators (acoustic, electromagnetic, or capacitive) that have different resonant frequencies. This universal antenna design allows one component to perform the function of what would traditionally require multiple specialized antennas, reducing device volume
2Measurement precision
If environmental conditions are compensated for, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent introduces a reference MEMS resonator that serves as an intermediary element to measure environmental conditions such as temperature. This reference resonator does not measure the target physical quantity but instead captures environmental variations. By comparing the response of the measurement resonator against this reference resonator, the system can distinguish between environmental effects and actual measurements, improving precision without requiring complex compensation algorithms or additional processing circuitry
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and efficient measurement of multiple physical quantities with reduced bulk, overcoming environmental sensitivity and extending reading distance beyond 10 cm.
Implementation Method 1
The intermodulation voltage is used for generating an oscillation of the MEMS resonator in response to incident electromagnetic energy, at two different frequencies
Implementation Method 2
Electro-magnetic transduction sensors combine a sensor with an antenna, which supplies power to the sensor, the electromagnetic signal transmitted (or backscattered) by the antenna in response to an incident electromagnetic signal being used for determining a measured physical quantity value
Data Source
AI summary
A passive wireless electronic component (2) including at least one antenna (14), the or each antenna having an associated antenna frequency, and comprising at least one resonant micro-electromechanical component having a resonant frequency and connected to a contact point of said antenna, forming an antenna-resonator assembly suitable for receiving an incident electromagnetic signal (Sl) including at least two frequencies and for transmitting a backscattered electromagnetic signal (Sr). The passive wireless electronic component (2) is such that the or each antenna (14) includes at least two non-linearly actuated resonant micro-electromechanical MEMS components (16, 18), each of said MEMS components having a natural mechanical resonant frequency thereof within a resonant frequency range, the resonant frequency ranges associated with two distinct MEMS components being disjointed.