Pattern Dimension Measuring Device Using Template Matching
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Solution Overview
Problem
Existing pattern dimension measurement techniques using scanning electron microscopes face challenges in measuring dimensions of patterns with complex edges and those far apart, as they require precise setup of measurement boxes and suffer from reduced precision due to low magnification imaging.
Innovation Solution
A pattern dimension measuring device and computer program that utilize beam deflection and pattern matching to calculate distances between patterns without the need for a measurement box, allowing for high precision measurements by acquiring high-magnification images and correcting deflection shifts at a sub-pixel level.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If low magnification imaging is used to capture patterns far apart, then the measurement range increases, but the measurement precision deteriorates
Solution Approach 1:
The measurement process is divided into two stages: first, a low magnification image is used to identify the positions of multiple patterns across a large area; second, high magnification images are acquired for each identified pattern to perform precise dimension measurements. This segmentation allows the system to overcome the limitation of capturing both large area and fine details in a single image.
Solution Approach 2:
The low magnification image serves as an intermediary that provides positional information about patterns far apart. This positional information guides the acquisition of high magnification images, acting as a bridge between the large measurement range requirement and the high precision measurement requirement.
2Measurement precision
If measurement box setup is required for pattern dimension measurement, then measurement precision can be maintained, but the ease of operation deteriorates for complex edge shapes
Solution Approach 1:
The system automatically identifies pattern positions and extracts dimension information from images without requiring manual setup of measurement boxes. The measurement process is self-service in that the system performs all necessary operations autonomously, eliminating the need for user intervention in setting measurement parameters and boundaries.
Solution Approach 2:
The manual mechanical process of setting measurement boxes is replaced by an automated image processing system that uses pattern recognition and coordinate analysis. This substitution eliminates the operational complexity associated with manually defining measurement regions for patterns with complex edge shapes.
Data Source
AI summary
The present invention aims at providing a pattern dimension measuring device that realizes the measurement of a dimension of a pattern difficult to set up a measurement box, or between patterns away from each other with high precision. In order to achieve the above object, a pattern dimension measuring device is proposed which moves a field of view with reference to a first pattern formed on the specimen on the basis of predetermined first distance information, acquires a first image, executes template matching with the use of the first image and a matching template, and calculates a distance between a second pattern included in the first image and the first pattern on the basis of second distance information obtained by the template matching, and the first distance information.