Patterned Carbon Nanotube Synthesis via Surface Energy Patterning

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Solution Overview

Problem

Conventional methods for producing two-dimensionally patterned carbon nanotubes on substrates are complex, expensive, and not suitable for high-resolution, low-cost, and mass production, while existing methods for low-cost production do not achieve local synthesis effectively.

Innovation Solution

A method involving substrate preparation with a mask and electromagnetic wave or electron beam irradiation to create hydrophobic and hydrophilic surfaces, followed by catalyst application and chemical vapor deposition to pattern carbon nanotubes, ensuring precise placement based on surface properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional methods (sputtering or vapor-depositing with physical mask or pre-exposure photoresist) are used to pattern the catalyst, then the catalyst can be patterned on the substrate, but the process becomes complicated and expensive

Engineering Contradiction:
Improvecatalyst patterning precisionVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces mechanical patterning methods (physical masks, photoresist) with a chemical field-based approach. By creating hydrophobic/hydrophilic surface patterns through electromagnetic wave irradiation and using liquid catalyst deposition that selectively adheres to hydrophilic regions, the process eliminates complex mechanical masking steps while achieving precise catalyst patterning.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the surface energy parameters of the substrate by creating regions with different hydrophobicity/hydrophilicity through electromagnetic wave irradiation. This parameter change enables selective catalyst deposition without mechanical masks, simplifying the process while maintaining patterning precision.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If floating CVD is used for CNT local synthesis, then the method is simpler, but it cannot successfully obtain SWNT on substrate

Engineering Contradiction:
Improvesynthesis method simplicityVSAvoidSWNT synthesis success rate
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent creates local quality differences on the substrate surface by forming hydrophobic and hydrophilic regions in specific patterns. The liquid catalyst selectively deposits only on hydrophilic regions, enabling precise local CNT synthesis. This local differentiation ensures SWNT growth only where needed while maintaining process simplicity.

Inventive Principle:
Principle #3Local quality

3Reliability

If dip coating with alcohol catalyst CVD is used, then high quality SWNT can be synthesized, but the method does not achieve local synthesis

Engineering Contradiction:
ImproveSWNT qualityVSAvoidlocal synthesis precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent introduces local quality differentiation by creating hydrophobic and hydrophilic surface regions through electromagnetic wave irradiation patterns. The liquid catalyst selectively adheres to hydrophilic regions, enabling both high-quality SWNT synthesis and precise spatial control for local synthesis applications.

Inventive Principle:
Principle #3Local quality

4Manufacturing precision

If conventional patterning methods are used, then catalyst can be patterned, but high resolution, low cost, and mass production capability are not simultaneously achieved

Engineering Contradiction:
Improvepattern resolutionVSAvoidmass production capability
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent replaces mechanical patterning systems with a field-based chemical deposition system. Electromagnetic wave irradiation creates surface energy patterns that guide liquid catalyst deposition, enabling high-resolution patterning without mechanical masks and facilitating mass production through simplified process steps.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent creates a universal patterning approach that combines electromagnetic wave irradiation, surface energy modification, and liquid deposition into a single integrated process. This multi-functional method simultaneously achieves high resolution, low cost, and mass production capability by eliminating the need for separate masking and deposition steps.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables high-resolution, low-cost, and mass production of two-dimensionally patterned carbon nanotubes with precise control over nanotube placement, addressing the limitations of existing techniques.

Implementation Method 1

covering the substrate with a mask and irradiating the substrate with an electromagnetic wave through the mask, in the presence or absence of electromagnetic wave irradiation without or with the mask, to form a first two-dimensional pattern consisting of a hydrophobic surface and a hydrophilic surface

Methodology Applied
Scientific EffectPhoto-oxidation: Photo-oxidation

Implementation Method 2

irradiating the substrate with an electron beam in the presence or absence of the electron beam irradiation, to form a first two-dimensional pattern consisting of a hydrophobic surface and a hydrophilic surface

Methodology Applied
Scientific EffectElectron beam irradiation: Electron Beam

Implementation Method 3

applying a catalyst-containing liquid on the substrate having the first two-dimensional pattern, to form a second two-dimensional pattern, depending on the presence or absence of the catalyst, wherein the hydrophilic surface retains the catalyst and the hydrophobic surface does not retain the catalyst

Methodology Applied
Scientific EffectHydrophile: Hydrophile

Implementation Method 4

forming a carbon nanotube on the resulting substrate by chemical vapor deposition under the presence of a carbon source, wherein the carbon nanotube is formed on the surface retaining the catalyst

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Data Source

PatentUS9944527B2Method for producing two-dimensionally patterned carbon nanotube and two-dimensionally patterned carbon nanotube
Publication Date: 2018.04.17 DENSO CORP
  • US9944527B2 patent drawing
  • US9944527B2 patent drawing

AI summary

Disclosed are a method for producing a carbon nanotube (CNT) whereby, in the local synthesis of CNTs, a high resolution, a low cost, easiness in production and mass production capability can be established at the same time; and a two-dimensionally patterned CNT obtained thereby.