Friction-Enhancing Patterned Roller for Wet Chemical Cleaning

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Solution Overview

Problem

Existing substrate cleaning processes in semiconductor manufacturing face challenges in maintaining consistent frictional contact during chemical mechanical polishing, leading to inadequate removal of residual polishing solution and particulates, which can result in substrate defects.

Innovation Solution

The use of compression molded articles with friction-enhancing patterns on their circumferential surfaces to improve contact between the substrate and the substrate rollers and sensor wheel, directing friction-reducing fluids away from the contact area and enhancing rotational stability and cleaning efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If friction-reducing fluids are used during wet chemical processes, then cleaning effectiveness is improved, but frictional contact between the substrate and substrate rollers/sensor wheel deteriorates

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidfrictional contact consistency

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The outer circumferential surface is segmented into distinct functional zones: a friction-enhancing patterned surface (with grooves, ridges, or textured features) and a smooth transition zone. This segmentation allows the friction-enhancing portion to maintain reliable frictional contact while the smooth zone manages fluid interaction, resolving the contradiction between cleaning effectiveness and friction consistency.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the outer circumferential surface are given different surface properties: the friction-enhancing portion has increased surface roughness or geometric features for reliable frictional contact, while other areas have smoother surfaces for fluid management. This local differentiation allows simultaneous optimization of friction reliability and cleaning effectiveness.

Inventive Principle:

Principle #3Local quality

2Productivity

If substrate rollers and sensor wheel are exposed to cleaning solution over time, then cleaning function is maintained, but frictional contact is compromised

Engineering Contradiction:

Improvecleaning functionVSAvoidfrictional contact

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The friction-enhancing patterns are pre-formed on the outer circumferential surface before the component is exposed to cleaning solutions during operation. This preliminary structuring ensures that frictional contact reliability is established in advance and maintained throughout the component's service life, counteracting the degrading effect of prolonged solution exposure.

Inventive Principle:

Principle #10Preliminary action

3Ease of manufacture

If compression molding is used to manufacture the article, then manufacturing efficiency is improved, but surface friction characteristics deteriorate

Engineering Contradiction:

Improvemanufacturing efficiencyVSAvoidsurface friction characteristics

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The friction-enhancing surface features are merged into the compression molding process itself, allowing the patterns to be formed during the primary manufacturing operation rather than requiring separate post-processing steps. This integration maintains manufacturing efficiency while achieving the desired friction characteristics.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The surface parameters (roughness, groove depth, ridge height) are optimized during compression molding to achieve the desired friction characteristics. By adjusting molding parameters such as pressure, temperature, and mold cavity design, the surface friction properties are tailored to enhance contact reliability while maintaining manufacturing efficiency.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution ensures effective positioning and movement of substrates during wet chemical processes, reducing the occurrence of defects by maintaining robust frictional contact and improving cleaning consistency.

Implementation Method 1

friction-reducing fluids associated with a wet chemical processes may be directed away from the desired friction contact area between the annular body and the substrate

Methodology Applied

Scientific EffectFluid direction/flow control:

Implementation Method 2

frictional contact between the annular body and the substrate may be enhanced

Methodology Applied

Scientific EffectFriction: Friction

Data Source

PatentUS9636714B2Compression molded articles employing circumferential surfaces having friction-enhancing patterns to contact substrates during wet chemical processes

Publication Date: 2017.05.02 APPLIED MATERIALS INC

AI summary

Compression molded articles employing circumferential surfaces having friction-enhancing patterns to contact substrates during wet chemical processes are disclosed. An article such as an annular body may be formed by a compression molding technique. By including a patterned surface as part of an outer circumferential surface of the annular body, frictional contact between the annular body and the substrate may be enhanced as friction-reducing fluids associated with a wet chemical processes may be directed away from the desired friction contact area between the annular body and the substrate. In this manner, frictional contact may be enhanced and the substrate may be effectively positioned and moved during the wet chemical process to improve the effectively of the process.