Patterned Semiconductor Crystal for Broadband THz Detection

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Solution Overview

Problem

Current semiconductor crystals used for detecting THz radiation beyond 2 THz frequencies have operating bandwidths and sensitivities that are inversely related, requiring different materials and complex alignments, making scalable detection challenging due to the invisibility and difficulty in detecting THz generation.

Innovation Solution

A patterned semiconductor crystal with a diffraction grating on its surface, fabricated using electron beam lithography, allows noncollinear alignment of near-infrared and THz pulses, increasing bandwidth and sensitivity by diffracting the NIR beam while keeping the THz unaffected, enabling the use of thick crystals without compromising spectral detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If thick semiconductor crystals are used for THz detection, then sensitivity is improved, but operating bandwidth decreases

Engineering Contradiction:
Improvedetection sensitivityVSAvoidoperating bandwidth
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent introduces a spatial dimension by patterning the crystal surface with a diffraction grating. This grating diffracts the NIR beam into multiple angles, creating a noncollinear geometry that decouples the sensitivity-bandwidth tradeoff. The grating equation relates the diffraction angle to the wavelength, enabling broadband detection while maintaining phase-matching conditions for enhanced sensitivity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent changes the geometric parameters of the detection setup by introducing a noncollinear angle between the NIR and THz beams. This angular parameter, controlled by the grating pitch and orientation, allows optimization of phase-matching conditions across a broad spectral range while using thick crystals for high sensitivity.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If different crystalline materials with different thicknesses are used for different spectral ranges, then operating bandwidth is improved, but device complexity increases

Engineering Contradiction:
Improvespectral detection rangeVSAvoidalignment complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent makes a single semiconductor crystal perform multiple functions by patterning it with a diffraction grating. The same thick crystal can detect THz radiation across a broad spectral range (0.2-5 THz) by utilizing the angular dispersion property of the grating, eliminating the need to switch between different crystal materials and thicknesses.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent segments the detection spectrum spatially by using the diffraction grating to direct different frequency components to different angles. This spatial multiplexing allows a single detector to capture a broad spectrum simultaneously, avoiding the complexity of multiple detectors or complex alignment mechanisms.

Inventive Principle:
Principle #1Segmentation

3Adaptability or versatility

If noncollinear geometry is used for broadband detection, then operating bandwidth is improved, but detection difficulty increases due to invisibility of THz generation

Engineering Contradiction:
Improvedetection bandwidthVSAvoidTHz signal detection
Core Design Contradiction:
Adaptability or versatilityVSDifficulty of detecting and measuring

Solution Approach 1:

The patent uses a diffraction grating as an intermediary optical element to make the noncollinear geometry controllable and measurable. The grating provides a well-defined angular relationship between the NIR and THz beams through the grating equation, enabling precise alignment and characterization of the noncollinear interaction without directly observing the invisible THz generation process.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach nearly doubles the detection bandwidth and efficiency of THz radiation, enhancing sensitivity and scalability by optimizing phase-matching conditions and reducing Fresnel reflection, while being applicable to various materials and fabrication processes.

Implementation Method 1

The grating allows a simultaneous increase of the operating bandwidth and sensitivity of the electro-optic sampling setup... The crystal is patterned using conventional electron beam lithography techniques, to deflect an incident NIR at an angle relative to the copropagating THz beam

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

Semiconductor crystals possessing a second-order optical nonlinearity are typically employed for this purpose, where electro-optic sampling allows detection of phase-locked THz transients

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Implementation Method 3

nearly doubles the bandwidth and efficiency of THz detection... optimizing phase-matching conditions and reducing Fresnel reflection

Methodology Applied
Scientific EffectFresnel reflection: Fresnel Diffraction

Data Source

PatentUS11422088B2Broadband THz receiver using thick patterned semiconductor crystals
Publication Date: 2022.08.23 OZ OPTICS
  • US11422088B2 patent drawing
  • US11422088B2 patent drawing

AI summary

There is provided a design of a device consisting of a patterned semiconductor material to provide enhanced detection bandwidth and efficiency of terahertz (THz) pulses with an electro-optic sampling. One device has a semiconductor crystal having a patterned grating on a surface of the semiconductor. In a system, there could optionally be a quarter-wave plate after the semiconductor crystal, followed by a prism. A pair of balanced photodiodes can optionally be provided after the prism. A pulse laser having a NIR beam and THz beam is sent through the semiconductor crystal to the quarter-wave plate to the prism to the photodiodes, wherein the patterned grating on the semiconductor crystal diffracts the NIR beam while the THz remains unaffected. The photodiodes can detect the result.