Patterned Substrate Drying Using Two-Layer Solid Fill Removal
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate drying processes often result in pattern collapse due to the removal of sublimable substances passing through the liquid phase, which can cause convex portions of the pattern to collapse.
Innovation Solution
A substrate processing method involving a two-layer laminate structure where a first material and a second material are applied in solid states to concave portions, and then removed through heating, light-emitting, or reaction processes using specific gases, preventing the need for a liquid phase and thus minimizing pattern collapse.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a sublimable substance solution is supplied to fill concave portions and then dried, then the concave portion can be filled with sublimable substance, but the pattern may collapse when the substance passes through liquid phase during drying
Solution Approach 1:
The patent applies sublimation phase transition to remove the first sublimable substance directly from solid to gas phase, avoiding the liquid phase that causes pattern collapse. For the second material, the patent uses decomposition or gas reaction to convert it directly to gas phase removal, also avoiding liquid phase. This phase transition strategy resolves the contradiction by eliminating the harmful liquid phase while maintaining effective material removal.
Solution Approach 2:
The patent changes the removal parameters by using different removal methods for different materials: heating for sublimation of the first material, and light-emitting or gas reaction for decomposition of the second material. These parameter changes enable direct solid-to-gas transitions without passing through liquid phase, preventing pattern collapse while achieving complete material removal.
2Reliability
If a single sublimable substance is used to fill concave portions, then the process is simple, but it cannot reliably prevent pattern collapse in all cases
Solution Approach 1:
The patent uses a composite two-layer structure: the first layer is a sublimable substance removed by heating, and the second layer is a decomposable material removed by light-emitting or gas reaction. This composite material approach improves reliability of pattern collapse prevention by using materials with different removal mechanisms, ensuring that neither material passes through the harmful liquid phase during removal.
Solution Approach 2:
The patent segments the filling material into two distinct layers with different properties and removal methods. The first sublimable substance layer is removed by heating, while the second decomposable material layer is removed by light-emitting or gas reaction. This segmentation allows each layer to be optimized for its specific removal mechanism, reliably preventing pattern collapse while managing the complexity through systematic division of functions.
3Loss of substance
If heating is applied to remove sublimable substance, then the substance can be sublimated and removed, but energy consumption increases
Solution Approach 1:
The patent employs periodic or selective heating actions: heating is applied specifically to the first sublimable substance layer at controlled temperatures, while the second decomposable material layer is removed using light-emitting or gas reaction without requiring high heating energy. This periodic and selective energy application achieves complete material removal while minimizing overall energy consumption compared to continuous high-temperature heating.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method reliably prevents pattern collapse by ensuring that the materials are removed in a solid state, maintaining the integrity of the substrate pattern during the drying process.
Implementation Method 1
removing the second material from the concave portion by performing at least one of a heating process, a light-emitting process, and a reaction process using a first gas with respect to the second material to sublimate, decompose, and gas-react the second material
Implementation Method 2
removing the second material from the concave portion by performing at least one of a heating process, a light-emitting process, and a reaction process using a first gas with respect to the second material to sublimate, decompose, and gas-react the second material
Implementation Method 3
removing the first material from the concave portion by performing at least one of the heating process, the light-emitting process, and a reaction process using a second gas with respect to the first material to sublimate, decompose, and gas-react the first material
Data Source
AI summary
A substrate processing method for removing liquid on a substrate having an uneven pattern formed on a surface of the substrate and drying the substrate. The substrate processing method includes: forming a laminate having a two-layer structure including a first material in a solid state forming a lower layer and a second material in a solid state forming an upper layer, in a concave portion of the pattern; removing the second material from the concave portion by performing at least one of a heating process, a light-emitting process, and a reaction process using gas with respect to the second material to sublimate, decompose, and gas-react the second material; and removing the first material from the concave portion by performing at least one of the heating process, the light-emitting process, and the reaction process using gas with respect to the first material to sublimate, decompose, and gas-react the first material.