Patterned TCO Quantum Particle Cell for Hermetic Sealing

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Solution Overview

Problem

Existing cold-atom cells face challenges with hermetic sealing due to high-conductivity metal feedthroughs that constrain optical and RF access and present points of failure, as they obstruct light and RF wavefronts while providing electrical connectivity.

Innovation Solution

The use of laser-modified transparent conductive oxide (TCO) to create high-resistivity boundaries within the cells, separating conductive regions and forming quasi-insulative high-resistivity regions, allowing for precise electrical control and reduced risk of breaching the hermetic seal.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If high-conductivity metal feedthroughs are used to provide electrical connectivity, then electrical control is achieved, but optical and RF access is constrained and hermetic sealing reliability deteriorates

Engineering Contradiction:
Improvehermetic sealing reliabilityVSAvoidoptical and RF access constraint
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent changes the electrical conductivity parameter of the TCO material through laser annealing, transforming it from a high-conductivity state to a high-resistivity state in specific boundary regions. This allows the same material to provide both electrical connectivity in conductive regions and optical/RF transparency in resistive regions, resolving the contradiction between electrical control and optical access

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite structure within the TCO coating by combining regions of different electrical properties (conductive and resistive) in a single integrated layer. This composite approach eliminates the need for separate metal feedthroughs and insulator components, maintaining hermetic sealing while enabling both electrical control and optical/RF access

Inventive Principle:
Principle #40Composite materials

2Ease of operation

If high-conductivity metal feedthroughs are used to provide electrical connectivity, then electrical control is achieved, but points of failure are introduced in hermetic sealing

Engineering Contradiction:
Improveelectrical control capabilityVSAvoidhermetic sealing integrity
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent merges the functions of electrical connectivity and hermetic sealing into a single integrated TCO coating system. The TCO coating continuously bridges the vacuum and ambient sides of the cell wall, eliminating separate metal feedthroughs that would create discontinuities and potential failure points in the hermetic seal

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

By locally changing the electrical resistance parameter of the TCO through laser annealing, the patent creates high-resistivity boundaries that electrically isolate regions while maintaining the continuous physical structure of the coating. This ensures hermetic sealing integrity is preserved while achieving electrical control through the conductive regions

Inventive Principle:
Principle #35Parameter changes

3Illumination intensity

If TCO coating is used to provide electrical paths, then optical access is maintained, but electrical connectivity is insufficient without high-conductivity regions

Engineering Contradiction:
Improveoptical transmissionVSAvoidelectrical connectivity
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

The patent applies local quality by creating spatially varying electrical properties within the TCO coating. Conductive regions with low resistance are positioned where electrical connectivity is needed, while high-resistivity boundary regions are positioned where electrical isolation is required. All regions maintain optical transparency, achieving both optical access and adequate electrical connectivity through localized property variation

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables secure hermetic sealing while maintaining optical and RF access, allowing for precise control of electric fields and reduced risk of failure, thereby enhancing the reliability and functionality of cold-atom cells.

Implementation Method 1

Lasers can be used to heat and anneal TCOs so as to increase their resistance by at least an order of magnitude

Methodology Applied
Scientific EffectLaser heating: Laser

Implementation Method 2

anneal TCOs so as to increase their resistance

Methodology Applied
Scientific EffectAnnealing: Annealing

Data Source

PatentUS20230246117A1Quantum-particle cell with patterned transparent conductive oxides
Publication Date: 2023.08.03 COLDQUANTA INC
  • US20230246117A1 patent drawing
  • US20230246117A1 patent drawing
  • US20230246117A1 patent drawing

AI summary

A quantum-particle cell manufacturing process includes coating a substrate with transparent conductive oxide (TCO) such as indium tin oxide (ITO). Regions of the TCO are then transformed, e.g., by pulsed-laser annealing, to increase their resistivity. The annealed region then electrically isolates adjacent higher conductivity and lower resistivity regions, which can serve as field plates. At least one annealed region extends from the cell interior through a bond between the substrate and sidewalls and into the cell exterior so that adjacent unannealed regions can serve as independently controllable feedthroughs. The annealing does not significantly affect the TCO thickness so the bond between the substrate and the sidewall structure remains intact and the completed quantum particle cell can be hermetically sealed.