Patterned X-Ray Target Structure for Precise Beam Shaping
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Solution Overview
Problem
Existing patterned X-ray emitting targets and X-ray sources face limitations in efficiency and versatility, particularly in XRS, XPS, and XRF systems, where the current technologies struggle to optimize X-ray emission and beam shaping for precise measurements.
Innovation Solution
The development of patterned X-ray targets comprising a gold impermeable mask, an active layer such as aluminum, and a diamond substrate with intermediate layers, bonded to a heat sink, which allows for improved bonding and modified properties to enhance X-ray emission and beam control, enabling precise X-ray emission patterns and efficient energy dissipation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a patterned X-ray target with gold mask and active layer is used, then X-ray emission pattern precision is improved, but device complexity increases
Solution Approach 1:
The X-ray target is segmented into multiple functional layers: a gold impermeable mask layer with patterned apertures, an active layer (aluminum or other materials) for X-ray generation, and a diamond substrate for thermal management. This segmentation allows each layer to be optimized independently for its specific function while achieving precise overall emission patterns.
Solution Approach 2:
The target employs composite material construction combining gold (for precise patterning and X-ray absorption), aluminum or other active materials (for efficient X-ray generation), and diamond substrate (for superior thermal conductivity). This composite approach resolves the contradiction by using material properties to achieve precision without requiring overly complex structural arrangements.
2Reliability
If intermediate layers are added between active layer and diamond substrate, then bonding reliability is improved, but manufacturing complexity increases
Solution Approach 1:
Intermediate bonding layers are introduced between the active layer and diamond substrate to serve as mediators that facilitate reliable bonding between dissimilar materials. These intermediate layers accommodate differences in thermal expansion coefficients and surface properties, ensuring robust mechanical and thermal contact while maintaining manufacturability through established deposition techniques.
3Loss of energy
If diamond substrate is used, then thermal conductivity is improved, but manufacturing precision requirements increase
Solution Approach 1:
The invention changes the thermal conductivity parameter of the substrate by selecting diamond material, which has exceptionally high thermal conductivity. This parameter change enables efficient heat removal from the active layer, preventing thermal damage and maintaining stable X-ray emission. The bonding precision requirements are managed through the use of intermediate bonding layers that accommodate dimensional variations.
4Ease of operation
If patterned mask with apertures is used, then beam control is improved, but X-ray intensity is reduced
Solution Approach 1:
The gold mask is designed with local quality variations through patterned apertures of specific geometries and dimensions. The mask material and aperture patterns are locally optimized to achieve precise beam shaping and directional control. The active layer beneath is similarly optimized with localized emission regions that correspond to the aperture patterns, maximizing X-ray generation efficiency in the desired directions while maintaining overall intensity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the performance of X-ray sources by improving X-ray emission patterns, beam control, and energy dissipation, leading to more accurate and efficient measurements in XRS, XPS, and XRF systems.
Implementation Method 1
A patterned X-ray target comprises a patterned X-ray impermeable mask which defines at least one X-ray passage window, an active layer which underlies the mask and is bombarded by electrons to form X-rays
Implementation Method 2
an active layer which underlies the mask and is bombarded by electrons to form X-rays
Implementation Method 3
a diamond substrate which underlies the active layer and is bonded to a heat sink
Implementation Method 4
a patterned X-ray impermeable mask which defines at least one X-ray passage window
Data Source
AI summary
The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.