Patterning Slit Sheet Alignment for Large OLED Substrates
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Solution Overview
Problem
The deposition method using a fine metal mask (FMM) for manufacturing organic light-emitting display devices faces challenges with large substrates, as the FMM may bend due to self-gravity, and the process of aligning and separating the mask from the substrate is time-consuming, leading to low production efficiency and inaccurate pattern formation.
Innovation Solution
A method involving a patterning slit sheet and two X motors that rotate and move the slit sheet to align with the substrate, allowing for the formation of a deposition layer with a linear pattern, which is parallel to the substrate's side, while the substrate and deposition assembly move relative to each other, enabling efficient and accurate deposition on large substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a large FMM is used to manufacture large organic light-emitting display devices, then the deposition coverage is improved, but the mask bends due to self-gravity making accurate pattern formation impossible
Solution Approach 1:
The patent divides the large substrate into multiple smaller regions, each processed by a corresponding smaller FMM. Instead of using one large mask for the entire substrate, multiple small masks are used simultaneously, each covering a specific region. This segmentation allows each small mask to maintain its structural integrity and pattern accuracy while collectively covering the large substrate area.
Solution Approach 2:
The patent transitions from a single-plane deposition approach to a multi-layer stacked configuration. Multiple FMMs are arranged in vertical layers, with each layer containing multiple small masks. This three-dimensional arrangement allows simultaneous deposition on large substrate areas while keeping each individual mask small and structurally stable.
2Productivity
If a large FMM is used to simultaneously manufacture multiple devices, then the production throughput is improved, but the mask becomes cumbersome and difficult to handle
Solution Approach 1:
The patent segments the manufacturing process into multiple independent deposition units, each with its own small FMM. Instead of moving one large mask around, multiple small masks are positioned in fixed deposition chambers. This segmentation makes each mask easier to manufacture, handle, and replace while maintaining high production throughput through parallel processing.
Solution Approach 2:
The patent introduces automated positioning and alignment systems as intermediaries between the operator and the FMMs. These systems include precision stages, alignment marks, and control mechanisms that automatically position the small masks relative to the substrates, eliminating the need for manual handling of large cumbersome masks.
3Manufacturing precision
If the substrate and FMM are closely aligned and contacted, then the deposition precision is improved, but the alignment and separation processes are time-consuming
Solution Approach 1:
The patent incorporates preliminary alignment features directly into the FMM design, such as pre-positioned alignment marks and mechanical guides. The substrates also include corresponding alignment features that automatically guide the mask into the correct position during loading. This preliminary preparation eliminates time-consuming manual alignment operations while maintaining high deposition precision.
Solution Approach 2:
The patent replaces manual mechanical alignment and separation operations with automated systems. Precision motorized stages control the relative positioning between masks and substrates, while automated loading/unloading mechanisms handle the separation process. This substitution of manual mechanical operations with automated control systems significantly reduces the time required for alignment and separation while maintaining or improving precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the efficient and accurate formation of deposition layers on large substrates, improving production efficiency and reducing the need for large, cumbersome masks, thus enhancing the manufacturing process for organic light-emitting display devices.
Implementation Method 1
a deposition assembly spaced apart from the substrate by a predetermined distance, the deposition assembly configured to deposit a material on the substrate
Data Source
AI summary
A method of manufacturing an organic light emitting display apparatus, the method includes loading a substrate on a moving unit, determining an angle formed between a side of the substrate and an opening in a patterning slit sheet, rotating the patterning slit sheet by two X motors so that the side of the substrate and the opening in a patterning slit sheet extend along the same direction and forming a layer on the substrate while conveying the substrate on the moving unit in the first direction in a chamber. The patterning slit sheet moves along a direction perpendicular to the first direction during the forming the layer on the substrate so that a deposition layer having a linear pattern that extends along the first direction is formed on the substrate.