Patterning Slit Sheet Assembly for Fine Pattern Deposition
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Solution Overview
Problem
The manufacturing of large and high-definition organic light-emitting display devices is hindered by the difficulty in forming thin films in fine patterns and the variability in luminous efficiency of the organic emission layer due to deposition processes, limiting the devices' driving voltage, current density, brightness, color purity, light-emission efficiency, and lifespan.
Innovation Solution
A patterning slit sheet assembly and organic layer deposition apparatus that includes a patterning slit sheet with slits corresponding to a desired pattern, supported by a frame and a support unit, allowing for precise deposition of materials onto a substrate while minimizing manufacturing errors and thermal expansion, enabling the formation of thin films in fine patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional deposition methods are used to form thin films, then the deposition process is simple, but the manufacturing precision of fine patterns deteriorates
Solution Approach 1:
The mask is divided into multiple segments (first mask segment and second mask segment) that can be independently positioned and adjusted. This segmentation allows for precise control of each pattern region while maintaining overall system manageability, resolving the contradiction between fine pattern precision and device complexity.
Solution Approach 2:
The mask is designed with movable segments that can be dynamically adjusted during the deposition process. The first and second mask segments can be independently positioned to achieve precise pattern formation, transforming a static complex structure into a dynamically controllable system that improves manufacturing precision without proportionally increasing complexity.
2Manufacturing precision
If the mask is fixed in position, then the apparatus structure is simple, but thermal expansion causes manufacturing precision to deteriorate
Solution Approach 1:
The mask support structure incorporates movable components that allow the mask segments to be adjusted during the deposition process. This dynamic adjustment capability compensates for thermal expansion effects, maintaining pattern alignment precision without requiring an overly complex rigid support structure.
Solution Approach 2:
The system allows for real-time parameter changes in mask position and orientation during deposition. By dynamically adjusting positional parameters, the system compensates for thermal expansion effects, maintaining manufacturing precision while avoiding the need for extremely rigid and complex support structures.
3Manufacturing precision
If a single mask structure is used, then the device complexity is low, but the manufacturing precision of complex patterns deteriorates
Solution Approach 1:
The mask is segmented into multiple independent sections (first mask segment and second mask segment) that can be separately positioned and adjusted. This segmentation enables precise control of complex patterns by treating different regions independently, achieving high manufacturing precision while keeping each individual segment manageable in complexity.
Solution Approach 2:
The mask structure incorporates adjustment capabilities in multiple spatial dimensions, allowing segments to be positioned and oriented independently. This multi-dimensional control enables precise formation of complex patterns without requiring a monolithic highly complex mask structure, as complexity is distributed across multiple adjustable components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for precise and efficient deposition of thin films in organic light-emitting display devices, improving the devices' performance characteristics such as driving voltage, current density, brightness, color purity, and lifespan, while facilitating the production of larger and more complex display devices.
Implementation Method 1
an organic layer deposition apparatus for forming an organic layer on a substrate
Implementation Method 2
an upper member which is allowed to be moved or fixed to support the patterning slit sheet when a gravitational force is applied to the patterning slit sheet
Data Source
AI summary
A patterning slit sheet assembly for performing a deposition process to form a thin film on a substrate in a desired fine pattern. The patterning slit sheet assembly includes a patterning slit sheet having a plurality of slits, a frame combined with the patterning slit sheet to support the patterning slit sheet, and a support unit including an upper member that is allowed to be moved or fixed to support the patterning slit sheet when a gravitational force is applied to the patterning slit sheet and a lower member disposed more apart from the patterning slit sheet than the upper member, wherein the upper member is fixed on the lower member.