PCB Multipole Ion Focusing for Vacuum Integrity
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Solution Overview
Problem
Existing particle beam devices face challenges in effectively focusing and storing ions, particularly secondary ions, due to their broad kinetic-energy distribution, which leads to inefficient transmission and analysis, and the pressure stage configuration is complex, affecting vacuum integrity and ion guidance.
Innovation Solution
An apparatus with a multipole unit, such as a quadrupole unit, is used to generate a multipole alternating field, focusing ions radially and axially within a small radius, and a pressure stage design that separates pressure areas effectively, allowing for efficient ion transmission and analysis while maintaining vacuum integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a quadrupole unit with metal bar electrodes is used to focus ions, then ion focusing capability is improved, but device complexity and manufacturing difficulty increase
Solution Approach 1:
The patent replaces the traditional mechanical quadrupole structure with metal bar electrodes with an electromagnetic field-based printed circuit board quadrupole unit. The PCB-based electrodes generate the necessary quadrupole electric field through circuit traces, eliminating complex mechanical assembly while achieving equivalent or superior ion focusing precision through electromagnetic field control.
Solution Approach 2:
The patent changes the physical form and material parameters of the quadrupole electrodes from solid metal bars to printed circuit board traces. This parameter change allows for more precise control of electric field distribution, easier manufacturing, and reduced device complexity while maintaining ion focusing capability.
2Reliability
If the pressure stage configuration is made complex to separate pressure areas, then vacuum integrity is improved, but device complexity increases
Solution Approach 1:
The patent designs the quadrupole unit to serve multiple functions simultaneously: it acts as both the ion focusing element and a component of the pressure stage structure. The PCB-based quadrupole unit integrates electrical isolation and pressure separation functions into a single multi-functional component, reducing overall device complexity while maintaining vacuum integrity.
Solution Approach 2:
The patent merges the quadrupole electrode structure with the pressure stage configuration. The PCB quadrupole unit is integrated into the pressure stage assembly, combining what would traditionally be separate components into a unified structure that achieves both ion focusing and pressure separation with fewer discrete parts.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus efficiently focuses ions to a small radius, reduces kinetic energy dispersion, and maintains good pressure stage characteristics, ensuring effective ion transmission and analysis without compromising vacuum conditions.
Implementation Method 1
at least one multipole unit, in particular at least one quadrupole unit, for providing a multipole alternating field, in particular for providing a quadrupole alternating field
Implementation Method 2
An apparatus for transmission of energy of a secondary ion to gas particles is known from the prior art. This apparatus has a container with an internal area in which a damping gas is located. The secondary ions generated by an ion beam are introduced into the container and transmit a portion of their kinetic energy to the gas particles by impacts.
Data Source
AI summary
An apparatus for focusing and for storage of ions and an apparatus for separation of a first pressure area from a second pressure area are disclosed, in particular for an analysis apparatus for ions. A particle beam device may have at least one of the abovementioned apparatuses. A container for holding ions and at least one multipole unit are provided. The multipole unit has a through-opening with a longitudinal axis as well as a multiplicity of electrodes. A first set of the electrodes is at a first radial distance from the longitudinal axis. A second set of the electrodes is in each case at a second radial distance from the longitudinal axis. The first radial distance is less than the second radial distance. Alternatively or additionally, the apparatus may have an elongated opening with a radial extent. The opening has a longitudinal extent which is greater than the radial extent.