PCB Vacuum Seal for Detector Alignment and Thermal Stability
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Solution Overview
Problem
Existing charged particle beam inspection systems face challenges in maintaining detector alignment and thermal stability due to applied disturbances, leading to misalignment and premature failure of opto-electric components, while inadequate sealing between atmospheric and vacuum environments results in contamination and prolonged pump-down times, affecting throughput and system life.
Innovation Solution
A detector module with a support system that maintains alignment relative to the charged particle beam path, incorporates thermal conditioning and electrical shielding, and uses a printed circuit board (PCB) to seal the vacuum system, ensuring hermetic separation of environments and reducing thermal distortions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a detector is mounted on a support in a vacuum chamber, then the detector can operate in the vacuum environment, but applied disturbances deform the support and cause misalignment of the detector relative to the charged particle beam path
Solution Approach 1:
The support structure is divided into multiple sections with separable portions that can be independently positioned and adjusted. This segmentation allows the detector module to be assembled in a controlled environment and then installed as a complete unit, reducing the impact of support deformation on detector alignment.
Solution Approach 2:
The patent replaces traditional mechanical alignment systems with a coordinate measurement system using lasers or other optical references. The detector position is measured and adjusted based on coordinate data rather than purely mechanical fixtures, compensating for support deformation through software-based alignment correction.
2Measurement precision
If opto-electric components are used in the detector, then high resolution detection is achieved, but the components are sensitive to thermal disturbances and suffer premature failure
Solution Approach 1:
The patent changes the thermal parameters of the system by introducing active thermal conditioning sections that can heat or cool specific areas of the detector module. This allows the opto-electric components to be maintained at optimal temperatures, compensating for thermal disturbances and preventing premature failure while preserving detection resolution.
3Reliability
If a printed circuit board is used to seal the vacuum system, then hermetic separation between atmospheric and vacuum environments is achieved, but the PCB must withstand pressure differential and maintain electrical connections
Solution Approach 1:
The printed circuit board is designed to perform multiple functions simultaneously: it provides the hermetic seal between vacuum and atmospheric environments, conducts electrical connections to the detector, and serves as a structural support element. This multi-functionality reduces the need for separate components and simplifies the overall system design while maintaining vacuum integrity.
Data Source
AI summary
Detector modules, systems and methods for detecting signal beams are disclosed using a detector module and a support comprising a feedthrough.Furthermore, apparatuses, systems, and methods for sealing a vacuum system configured to provide an atmospheric environment and a vacuum chamber environment are disclosed. In some embodiments, a printed circuit board (PCB) comprising a first side for exposing to the atmospheric environment and a second side for exposing to the vacuum chamber environment and for covering an aperture in the vacuum chamber environment, wherein the second side is opposite to the first side. The apparatuses, systems, and methods may include a rigid body on the first side of the PCB and a device connected to the second side of the PCB and positioned on a portion of the PCB that covers the aperture. The PCB may be configured to provide an interface between the device and the rigid body.