PCI Board Clock Synchronization for Semiconductor Control Accuracy

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Solution Overview

Problem

Semiconductor manufacturing apparatuses face challenges in achieving precise control with errors exceeding 2-3 ms due to limitations in operating system clock synchronization and high costs associated with real-time extension software like RTX.

Innovation Solution

Using the internal clock of a PCI board for data communication in the controller to implement more accurate control, reducing errors to 50 ms±1 ms, and maintaining low apparatus costs by replacing the system clock with the PCI board's clock for time interval measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If RTX (real time extension) is used to reduce control error, then control accuracy is improved, but apparatus cost increases

Engineering Contradiction:

Improvecontrol accuracyVSAvoidapparatus cost

Core Design Contradiction:

Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent replaces expensive RTX software with a free alternative approach using the PCI board's internal clock. The PCI board's clock provides sufficient accuracy (±1 ms) without requiring costly real-time extension software, thereby reducing apparatus cost while maintaining control accuracy.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

2Adaptability or versatility

If operating system clock is used for control, then system compatibility is maintained, but control accuracy deteriorates due to synchronization error

Engineering Contradiction:

Improvesystem compatibilityVSAvoidcontrol accuracy

Core Design Contradiction:

Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent introduces the PCI board's internal clock as an intermediary time reference between the operating system and the input/output control interface. This intermediary clock synchronizes control operations without requiring changes to the operating system, thereby maintaining system compatibility while achieving ±1 ms control accuracy.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Manufacturing precision

If finer processing control is implemented, then manufacturing precision is improved, but control accuracy requirement increases

Engineering Contradiction:

Improveprocessing finenessVSAvoidcontrol accuracy requirement

Core Design Contradiction:

Manufacturing precisionVSMeasurement precision

Solution Approach 1:

The patent changes the time reference parameter from the operating system clock to the PCI board's internal clock. This parameter change enables finer control accuracy (±1 ms) required for finer semiconductor wafer processing, allowing manufacturing precision to be improved without compromising control accuracy.

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS7831315B2Method for controlling semiconductor-processing apparatus

Publication Date: 2010.11.09 ASM IP HLDG BV

AI summary

A method controls an apparatus such as a semiconductor-processing apparatus including a controller and at least one device controlled by the controller, wherein the controller is provided with an interface for communicating with the device, and the interface has an internal clock for measuring time intervals for the communication. The method includes: replacing a system clock of the controller's operating system, which is used for transmitting instructions to the interface, with the internal clock of the interface; transmitting instructions to the interface from the controller using the time intervals measured by the internal clock substituting the system clock; and transmitting the instructions to the device from the interface using the time intervals measured by the internal clock in the interface, thereby controlling the device.