4-Terminal Phase Change Memory Switch With Wrap-Around Gate

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Solution Overview

Problem

Current phase change memory (PCM) devices use only two terminals for programming and reading, limiting their usefulness as electrical switching devices due to the lack of separation between control and signal circuits.

Innovation Solution

A 4-terminal switching device is developed using a phase change material with a wrap-around gate dielectric layer and metal gate liner, where the gate dielectric layer is orthogonal to the phase change layer, allowing for complete separation of control and signal circuits.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a two-terminal PCM device is used, then the device structure is simple, but the control and signal circuits cannot be separated

Engineering Contradiction:
Improvedevice structureVSAvoidcircuit separation capability
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The device is divided into four separate terminals: two signal terminals (for reading) and two control terminals (for programming). This segmentation allows independent control circuits and signal circuits to be separated, resolving the contradiction between simple structure and circuit separation capability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from a two-terminal configuration to a four-terminal configuration by adding spatial dimensions and functional layers (gate dielectric layer, metal gate liner, phase change layer). This dimensional expansion enables circuit separation while maintaining device functionality.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If a four-terminal switching device with wrap-around gate is used, then control and signal circuits are completely separated, but the device structure becomes more complex

Engineering Contradiction:
Improvecircuit separation capabilityVSAvoiddevice structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The gate dielectric layer and metal gate liner serve multiple functions: they provide electrical isolation between control and signal circuits, enable thermal coupling for phase change, and form the wrap-around gate structure. This multi-functionality reduces the need for additional separate components, mitigating the increase in device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If the gate dielectric layer is made orthogonal to the phase change layer, then complete separation of control and signal circuits is achieved, but manufacturing precision requirements increase

Engineering Contradiction:
Improvecircuit separation capabilityVSAvoidlayer alignment precision
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The metal liner acts as an intermediary layer between the phase change layer and the gate dielectric layer. It provides a reference plane and facilitates precise alignment during manufacturing, reducing the impact of orthogonal configuration on manufacturing precision requirements.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables broader applications by allowing for independent control of the phase change material's state, enhancing the device's functionality as a non-volatile memory device with increased memory density.

Implementation Method 1

the phase change material is capable of transitioning between a crystalline phase and an amorphous phase responsive to an electrical current passing through the phase change material

Methodology Applied
Scientific EffectPhase change: Phase Change

Implementation Method 2

To set the PCM in the amorphous phase, the phase change material is first melted and then quenched rapidly by applying a large electrical current pulse

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 3

a metal gate liner disposed on the gate dielectric layer

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS11316105B2Phase change material switch and method of fabricating same
Publication Date: 2022.04.26 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • US11316105B2 patent drawing
  • US11316105B2 patent drawing
  • US11316105B2 patent drawing

AI summary

A phase change material switch includes a phase change layer disposed on a metal liner. A gate dielectric layer is disposed on the phase change layer. A metal gate liner is disposed on the gate dielectric layer.