PDMS Carrier Substrate for Non-Conventional Lithographic Handling
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Solution Overview
Problem
Conventional lithographic apparatuses face challenges in securely holding substrates with non-conventional shapes or structures, as vacuum clamping is not effective due to features like slots or holes, preventing proper alignment and pattern projection.
Innovation Solution
A carrier substrate with a layer of PDMS and curing agent is used to adhere and support lithographic substrates, allowing them to be handled and vacuum-clamped conventionally, enabling pattern projection and processing within existing lithographic apparatuses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If vacuum clamping is used to hold substrates on the substrate table, then substrates with conventional shapes can be securely held and processed, but substrates with non-conventional shapes (containing slots or holes) cannot be securely held
Solution Approach 1:
A carrier substrate is introduced as an intermediary between the vacuum substrate table and the lithographic substrate with non-conventional shape. The carrier substrate has a conventional shape that can be vacuum-clamped, while the lithographic substrate is bonded to its upper surface. This mediator enables substrates with slots or holes to be securely held during processing.
Solution Approach 2:
The system is divided into three separate components: the vacuum substrate table, the carrier substrate, and the lithographic substrate. This segmentation allows each component to perform its specific function - the table provides vacuum, the carrier provides mechanical support and vacuum interface, and the lithographic substrate provides the patterned surface.
2Adaptability or versatility
If substrates with non-conventional shapes are used, then design flexibility is improved, but the ability to be handled by conventional lithographic apparatus is degraded
Solution Approach 1:
The carrier substrate acts as a mediator that interfaces with conventional lithographic apparatus handling systems. It has the conventional dimensions and shape required by standard equipment, while carrying the non-conventionally shaped lithographic substrate, thus enabling design flexibility without sacrificing handling compatibility.
Solution Approach 2:
The carrier substrate serves multiple functions: it provides a vacuum-clampable interface for conventional equipment, offers mechanical support for fragile or non-conventional substrates, and enables the use of substrates with various shapes and sizes that would otherwise be incompatible with standard lithographic systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the secure handling and processing of substrates with non-conventional shapes by maintaining adhesion during pattern projection and subsequent processing steps, facilitating the use of substrates with slots or holes in conventional lithographic systems.
Implementation Method 1
a layer of PDMS and curing agent provided on one side, the PDMS and curing agent being arranged to receive and adhere to a lithographic substrate
Data Source
AI summary
A carrier substrate is provided with a layer of PDMS and curing agent on one side of the carrier substrate. The PDMS and curing agent can be arranged to receive and adhere to a lithographic substrate. The carrier substrate can be dimensioned such that the combined carrier substrate and lithographic substrate may be handled by a conventional lithographic apparatus.