Peak Force Tapping AFM Mode for High-Speed Low-Force Imaging

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Solution Overview

Problem

Conventional atomic force microscopes (AFMs) face limitations in achieving high-resolution imaging at high speeds while maintaining low tip-sample interaction forces, particularly when imaging soft samples, as they struggle to control normal forces effectively, leading to potential damage and compromised resolution.

Innovation Solution

The Peak Force Tapping (PFT) mode of operation, which involves controlling the feedback loop using instantaneous interaction forces to maintain a steady state interaction between the tip and sample, allowing for low force imaging with improved resolution and speed by moving the tip perpendicularly to the sample surface and using cantilevers with a wide range of spring constants.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional AFM operation modes are used to achieve high-resolution imaging, then imaging resolution is improved, but scanning speed decreases and tip-sample interaction forces increase

Engineering Contradiction:
Improveimaging resolutionVSAvoidscanning speed
Core Design Contradiction:
Measurement precisionVSSpeed

Solution Approach 1:

The probe is oscillated periodically at its resonant frequency during scanning, allowing the tip to interact with the sample surface in a rhythmic tapping motion rather than continuous contact. This periodic interaction enables high-speed scanning while maintaining atomic-resolution imaging capability, as the oscillating probe can rapidly cycle between engagement and retraction phases

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The cantilever probe is driven to vibrate at its resonant frequency, creating dynamic mechanical oscillation that facilitates rapid scanning. The vibrational motion allows the tip to briefly contact the sample surface at the oscillation minimum, providing sufficient interaction time for high-resolution detection while minimizing total contact time to enable faster scanning speeds

Inventive Principle:
Principle #18Mechanical vibration

2Stability of the object's composition

If tip-sample interaction forces are increased to maintain steady contact during scanning, then tracking stability is improved, but damage to soft samples increases

Engineering Contradiction:
Improvetracking stabilityVSAvoidsample damage
Core Design Contradiction:
Stability of the object's compositionVSObject-affected harmful factors

Solution Approach 1:

By oscillating the probe periodically and controlling the oscillation amplitude and frequency, the tip interacts with the sample surface in controlled brief contacts rather than sustained pressure. The feedback loop maintains a setpoint oscillation amplitude that ensures stable tracking of surface features while limiting the duration and force of each interaction to prevent damage to soft or delicate samples

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

A feedback control system continuously monitors the oscillation amplitude of the cantilever and adjusts the z-position of the scanner to maintain a constant setpoint amplitude. This feedback mechanism ensures stable tracking of the sample surface by compensating for height variations, while simultaneously keeping tip-sample forces low by preventing excessive engagement depth that would occur without active control

Inventive Principle:
Principle #23Feedback

3Productivity

If scanning speed is increased to improve productivity, then output is improved, but image resolution deteriorates and force control becomes difficult

Engineering Contradiction:
Improvescanning speedVSAvoidimage resolution
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The resonant oscillation of the cantilever provides a natural high-frequency motion that enables rapid scanning without sacrificing resolution. The vibrational frequency of the probe matches its resonant frequency, allowing the system to operate at maximum speed while maintaining the precise periodic interaction needed for high-resolution imaging

Inventive Principle:
Principle #18Mechanical vibration

Solution Approach 2:

The feedback loop responds to changes in oscillation amplitude caused by tip-sample interactions and rapidly adjusts the scanner position to maintain constant amplitude. This fast feedback response enables the system to track surface features accurately even at high scanning speeds, preventing resolution degradation that would occur with slower response times

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

PFT mode enables high-resolution imaging with forces as low as 10 pN and peak forces less than 5 nN, allowing for simultaneous acquisition of height and mechanical property data, and can maintain image resolution better than 5 nanometers for extended periods without user intervention, even in various environments.

Implementation Method 1

scanner 24 often comprises a piezoelectric stack (often referred to herein as a 'piezo stack') or piezoelectric tube that is used to generate relative motion between the measuring probe and the sample surface

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

probe 17 is often coupled to an oscillating actuator or drive 16 that is used to drive probe 17 to oscillate at or near a resonant frequency of cantilever 15

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS11002757B2Method and apparatus of operating a scanning probe microscope
Publication Date: 2021.05.11 BRUKER NANO INC
  • US11002757B2 patent drawing
  • US11002757B2 patent drawing
  • US11002757B2 patent drawing

AI summary

An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.