Semiconductor Equipment Module Assembly With Pedestal Alignment Stops
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Solution Overview
Problem
Positioning high mass equipment modules in semiconductor fabrication plants with limited space is challenging due to their bulkiness and the need for precise alignment relative to reference elements, which complicates the assembly process.
Innovation Solution
A semiconductor processing system and method that utilize a pedestal with positionable stops in a horizontal plane defined by X and Y directions, allowing equipment modules to be moved and fixed relative to reference elements using stop surfaces and alignment jigs for accurate positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If equipment modules are moved manually into position, then assembly can be performed with simple equipment, but positioning accuracy relative to reference elements is insufficient
Solution Approach 1:
The patent introduces stops as intermediary elements that are first positioned accurately relative to reference elements using alignment jigs, then serve as fixed reference points for positioning equipment modules. This mediator approach transfers the positioning task from direct equipment-module-to-reference-element alignment to equipment-module-to-stop alignment, achieving high positioning accuracy without requiring complex automated positioning systems.
Solution Approach 2:
The stops are positioned and fixed to the pedestal before the equipment modules are installed. This preliminary positioning creates a stable reference framework that simplifies subsequent equipment module placement. The alignment jigs are also used in advance to establish the correct positions of the stops relative to the reference elements, enabling accurate positioning without complex real-time measurement systems.
2Ease of operation
If more space is provided for movement, then positioning of equipment modules becomes easier, but the fabrication plant layout is constrained by existing neighboring systems
Solution Approach 1:
The stops serve as fixed intermediary reference points that are positioned on the pedestal before equipment modules arrive. This allows equipment modules to be positioned accurately even in tight spaces, as the stops provide predetermined alignment references that eliminate the need for large movement areas and complex real-time alignment procedures.
Solution Approach 2:
The positioning system is segmented into two independent stages: first positioning the stops relative to reference elements using alignment jigs, then positioning equipment modules relative to the stops. This segmentation allows each stage to be performed with simple equipment and minimal space, avoiding the need for large open areas required by single-stage direct positioning methods.
3Productivity
If equipment modules are positioned relative to reference elements directly, then alignment accuracy can be achieved, but the assembly process becomes time-consuming and complex
Solution Approach 1:
The stops are positioned and fixed to the pedestal in advance using alignment jigs to establish their precise locations relative to reference elements. This preliminary action creates a permanent reference framework that remains in place during equipment module installation, enabling rapid positioning without repeated measurements or complex alignment procedures for each module.
Solution Approach 2:
The stops act as intermediary reference elements that simplify the positioning process. Instead of directly aligning each equipment module with the original reference elements (a time-consuming process), workers simply align modules with the pre-positioned stops, significantly reducing assembly time while maintaining accuracy through the stops' fixed positions.
Data Source
AI summary
A semiconductor processing system and a method for assembling such a system in a room of a semiconductor fabrication plant. The system comprises an equipment module and a pedestal. The equipment module may be movable over the pedestal to bring the equipment module in an end position and may have a plurality of stop surfaces. The method comprises placing the pedestal in the room, placing two stops on the pedestal and positioning the two stops relative to reference elements in the room, and connecting the positioned stops to the pedestal so that the positions thereof in the X-direction and Y-direction are fixed. The equipment module may be moved over the pedestal until the stop surfaces of the equipment module abut against the stops so as to position the equipment module in the X-direction and Y-direction relative to the reference elements.