Peeling Apparatus Discarding Unit Inclined Plate Air Jet Stacking

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Solution Overview

Problem

Conventional peeling apparatuses struggle to properly stack protective members in a trash box due to changes in resin hardness or thickness, leading to improper stacking and increased worker burden when extracting filled trash boxes.

Innovation Solution

A peeling apparatus with a discarding unit featuring inclined plates and air jets that guide the protective member to form a protruding shape, allowing it to pass through the trash box opening and stack horizontally, even with varying resin properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If the hardness or thickness of the resin is increased to accommodate greater undulation or warp, then the protective member can better hold the wafer flatly, but the force necessary to bend the protective member changes and the degree of bending differs among protective members, causing improper stacking in the trash box

Engineering Contradiction:
Improveprotective member rigidityVSAvoidstacking consistency
Core Design Contradiction:
StrengthVSEase of operation

Solution Approach 1:

The patent introduces an air blowing unit that changes the physical state of the protective member by applying airflow. This allows the protective member to be bent to a consistent degree regardless of its hardness or thickness variations, enabling proper stacking in the trash box while maintaining the ability to accommodate different wafer undulations and warps through resin parameter changes

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If different liquid resins are used to change hardness or thickness based on undulation or warp magnitude, then the protective member can be customized for different wafer conditions, but the bending force and degree vary among protective members, leading to improper stacking

Engineering Contradiction:
Improveresin selection flexibilityVSAvoidstacking uniformity
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The air blowing unit acts as an intermediary between the protective member and the stacking process. By introducing controlled airflow, it standardizes the bending degree of protective members with varying resin properties, ensuring uniform stacking in the trash box while preserving the ability to select different resins for different wafer conditions

Inventive Principle:
Principle #24Intermediary (Mediator)

3Device complexity

If only two inclined pipes are used to bend and drop the protective member, then the structure is simple, but protective members with varying hardness or thickness cannot be consistently bent and stacked properly in the trash box

Engineering Contradiction:
Improvediscarding unit structureVSAvoidstacking reliability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent merges the air blowing unit with the existing inclined pipe structure. The air blowing unit is positioned to blow air toward the interior of the trash box, working in conjunction with the inclined pipes to consistently bend and guide protective members into proper stacking positions, thereby improving stacking reliability without significantly increasing structural complexity

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Ensures proper stacking of protective members within the trash box, reducing the frequency of worker intervention and maintaining efficient disposal despite changes in resin hardness or thickness.

Implementation Method 1

a holding unit configured to hold another surface of the wafer under suction on a holding surface

Methodology Applied
Scientific EffectSuction: Suction

Implementation Method 2

the first inclined plate and the second inclined plate each have a first air jetting port configured to jet air

Methodology Applied
Scientific EffectAir lubrication: Air Lubrication

Implementation Method 3

two pipes that are arranged individually on a lower end side of the first inclined plate and a lower end side of the second inclined plate and that each have a second air jetting port configured to jet air, and the air jetted from the second air jetting port generates airflow moving upward from below

Methodology Applied
Scientific EffectAirflow generation: Jet

Implementation Method 4

an inclined dropping unit configured to drop the protective member gripped by the gripping unit obliquely downward to the opening of the trash box

Methodology Applied
Scientific EffectGravitational force: Gravitation

Data Source

PatentUS20220262659A1Peeling apparatus
Publication Date: 2022.08.18 DISCO CORP
  • US20220262659A1 patent drawing
  • US20220262659A1 patent drawing
  • US20220262659A1 patent drawing

AI summary

A peeling apparatus includes a discarding unit configured to discard a protective member by stacking the protective member in a trash box. The discarding unit includes an inclined dropping unit configured to drop the protective member obliquely downward to an opening of the trash box, and a first inclined plate and a second inclined plate that arranged so as to face each other in a direction orthogonal to a traveling direction of the protective member when the protective member dropping obliquely downward above the opening is viewed from above. The first inclined plate and the second inclined plate are arranged such that a gap through which the protective member can pass is formed between a lower side of the first inclined plate and a lower side of the second inclined plate, and the first inclined plate and the second inclined plate are inclined.