Pellicle Agglutinant Layer Bubble Suppression
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Solution Overview
Problem
In photolithography, the densification of patterns and shorter wavelengths of exposure light require a pellicle agglutinant layer with high reliability and uniformity, but existing methods struggle with air bubble contamination, leading to inadequate adhesion and deformation issues, and increasing manufacturing costs.
Innovation Solution
The agglutinant structure is procured using an adhesive prepared under a helium gas atmosphere, which suppresses air bubble contamination through steps like storing, pressurizing, stirring, and de-foaming, ensuring a bubble-free layer for the pellicle.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a coating layer of silicone resin is formed over the pellicle frame surface to prevent air bubbles, then air bubble contamination is reduced, but manufacturing cost increases
Solution Approach 1:
The patent applies the inert atmosphere principle by conducting the agglutinant preparation process in a nitrogen gas environment. This prevents air (oxygen) from dissolving into the agglutinant during mixing and storage, thereby eliminating air bubble contamination without requiring additional coating layers or increasing manufacturing complexity
Solution Approach 2:
The patent implements preliminary action by preparing the agglutinant in advance under a nitrogen atmosphere and storing it in nitrogen-filled containers before application. This pre-preparation in an inert environment ensures that no air bubbles are introduced during subsequent handling or application processes
2Reliability
If the agglutinant layer is required to have higher uniformity and no air bubbles, then adhesion reliability improves, but manufacturing complexity increases
Solution Approach 1:
The patent uses a nitrogen atmosphere throughout the agglutinant preparation process, from mixing to storage to application. This consistent inert environment prevents air bubble formation and ensures uniform quality without requiring complex additional equipment or processes
Solution Approach 2:
The patent introduces nitrogen gas as an intermediary medium to replace air during the agglutinant preparation process. This intermediary atmosphere acts as a barrier between the agglutinant and atmospheric air, preventing oxygen dissolution and air bubble formation while simplifying the overall manufacturing approach
3Manufacturing precision
If air bubbles are excluded from the agglutinant layer through stringent quality control, then pellicle quality improves, but production yield decreases
Solution Approach 1:
The patent implements a nitrogen atmosphere system that covers the entire agglutinant preparation and application process. This prevents air bubble contamination at the source, ensuring high pellicle quality without requiring post-manufacturing inspection and rejection of defective items, thereby maintaining high production yield
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively reduces air bubble contamination in the agglutinant layer, maintaining low manufacturing costs and ensuring high-quality, reliable pellicles suitable for semiconductor devices with minimal distortion.
Implementation Method 1
pressurizing, stirring, and de-foaming
Implementation Method 2
de-foaming, ensuring a bubble-free layer
Data Source
AI summary
There is provided a method for procuring an agglutinant structure or in particular an agglutinant layer, from an agglutinant material, which is laid on an end face of a pellicle frame for gluing the pellicle to a photomask, wherein the agglutinant material is processed into the agglutinant layer passing through one more stages wherein the material is under a helium gas atmosphere; the invention is also about a manufacturing method of a pellicle wherein the agglutinant layer is procured in the above described manner.