Thin Pellicle for Solid-State Electron Detector Protection

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Solution Overview

Problem

Semiconductor manufacturing requires effective protection for electron detectors from kinetic and thermal energy, as well as electrical charge, to prevent damage and ensure high-yield production, especially as device dimensions shrink and defect detection becomes more critical.

Innovation Solution

A protective pellicle is implemented on the detector face, which is transparent to back-scattered electrons and acts as a physical barrier to particles, functioning as an electrical conductor to drain charge and a thermal conductor to dissipate heat, while being monoatomic and possibly made of graphene or its analogs to maintain detector functionality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a protective element is added to the detector face, then the detector is protected from kinetic energy, thermal energy, and electrical charge damage, but the device complexity increases

Engineering Contradiction:

Improvedetector protectionVSAvoiddetector structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

A thin film pellicle is disposed on the detector face to provide protection from particles, kinetic energy, thermal energy, and electrical charge. The pellicle is sufficiently thin to be transparent to back-scattered electrons while providing the necessary protective barrier, thus resolving the contradiction between protection and complexity.

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The pellicle acts as an intermediary layer between the detector face and the particles in the inspection chamber. It intercepts harmful particles and energy before they reach the detector, while allowing beneficial back-scattered electrons to pass through, thus protecting the detector without requiring complex structural modifications.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Reliability

If a protective barrier is placed on the detector face, then particles are blocked from damaging the detector, but back-scattered electron detection may be impaired

Engineering Contradiction:

Improvedetector protection from particlesVSAvoidelectron detection accuracy

Core Design Contradiction:

ReliabilityVSMeasurement precision

Solution Approach 1:

The pellicle is designed as an extremely thin film that is transparent to back-scattered electrons. This thinness allows electrons to pass through with minimal interaction and energy loss, maintaining detection precision while the film provides sufficient barrier protection against particles.

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The pellicle material is selected to have specific local properties: it is thin and electron-transparent in the regions where electron detection is needed, while providing sufficient mechanical and thermal protection where particles pose a threat. The material's electron transparency and particle blocking properties are optimized locally.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The protective pellicle effectively prevents damage to the detector by intercepting and managing kinetic and thermal energy from particles, improving the detector's lifespan and accuracy while allowing back-scattered electrons to be detected, thus enhancing semiconductor manufacturing efficiency.

Implementation Method 1

The protective pellicle may be an electrical conductor, configured to drain charge from particles directed at the detector face intercepted by the protective pellicle

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

The protective pellicle may be a thermal conductor, configured to dissipate heat from particles directed at the detector face intercepted by the protective pellicle

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

a protective pellicle disposed on the annular cap, covering the detector face. The protective pellicle may be transparent to back-scattered electrons and provides a physical barrier to particles directed at the detector face

Methodology Applied

Scientific EffectPhysical containment: Physical Containment

Data Source

PatentUS11443916B2Thin pellicle material for protection of solid-state electron detectors

Publication Date: 2022.09.13 KLA CORP

AI summary

An electron beam system and method are provided. The system includes a detector having a detector face configured to detect back-scattered electrons reflected off of a sample. The system further includes an annular cap disposed on the detector face, and a protective pellicle disposed on the annular cap, covering the detector face. The protective pellicle is transparent to back-scattered electrons and provides a physical barrier to particles directed at the detector face.