Pellicle Frame Venting Structure for Clean Filter Integration
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Solution Overview
Problem
Conventional pellicle frames face challenges in easy cleaning and inspection due to particle generation during filter manufacturing, inadequate filtering efficiency, and insufficient buffering against pressure changes, which can damage the membrane.
Innovation Solution
A pellicle frame design with a two-layer structure featuring recessed portions and filters positioned within vent holes, allowing for easy cleaning and inspection, reduced particle generation, and effective filtering with double-layered shielding to buffer pressure changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If filters are installed in vent holes to prevent particle infiltration, then filtering efficiency is improved, but particle generation during filter manufacturing and installation becomes a problem
Solution Approach 1:
The pellicle frame is divided into a first frame member and a second frame member that are coupled together. The vent hole is formed by recessed portions on both frame members, and the filter is segmented to fit within these recessed portions. This segmentation allows the filter to be installed without requiring drilling through the entire frame thickness, reducing particle generation during installation while maintaining filtering efficiency.
Solution Approach 2:
Recessed portions are pre-formed on the frame members before filter installation. These recessed portions are specifically designed to accommodate the filter, allowing for easy and clean installation without requiring complex drilling operations that generate particles. The preliminary preparation of the frame structure facilitates particle-free filter installation.
2Ease of manufacture
If conventional drilling processes are used to form vent holes, then vent holes are created for pressure equalization, but particle generation occurs during drilling and cleaning becomes difficult
Solution Approach 1:
Instead of drilling a single deep hole through the thick frame, the vent hole is segmented into shallow recessed portions on each frame member. This segmentation eliminates the need for deep drilling operations that generate excessive particles and are difficult to clean, while still achieving the required venting function.
Solution Approach 2:
Rather than forming the vent hole by removing material through drilling, the invention forms vent holes by creating recessed portions on the frame surfaces that accommodate filters. This inverted approach - forming shallow recesses instead of deep holes - significantly reduces particle generation during manufacturing and simplifies cleaning procedures.
3Reliability
If single-layer filtering is used in vent holes, then particle filtration is achieved, but buffering capacity against pressure changes is insufficient
Solution Approach 1:
The filtering function is segmented across two frame members, with each member containing a recessed portion that holds a filter. This creates a double-layered filtering structure that provides both enhanced particle filtration and improved pressure buffering capacity, while the segmented design integrates smoothly into the overall frame structure without excessive complexity.
Solution Approach 2:
The filters are nested within the recessed portions of the frame members, creating a compact multi-layered structure. The first filter in the first frame member and the second filter in the second frame member work together as nested protective layers, providing enhanced pressure buffering and filtration without significantly increasing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design facilitates easy cleaning and inspection, minimizes particle generation, enhances filtering efficiency, and protects the membrane from pressure changes by providing double-layered shielding.
Implementation Method 1
a filter (400) disposed between the first and second frame members (100, 200) in the vent hole (330) to block the vent hole (330)
Implementation Method 2
the recessed portions (110) forming a vent hole (330) opened laterally from the plate surfaces in coupled state
Data Source
AI summary
Pellicle frame having a pair of frame members is provided. Each of the frame member is formed to correspond to the shape of a support part of the pellicle. These frame members are mutually coupled with their plate surfaces overlapped to form a two-layer structure. Recessed portions are formed on mutually corresponding areas of the opposing inner surfaces of the frame members. These recessed portions create vent holes that open laterally from the plate surfaces when the frame members are coupled. A filter is interposed within each vent hole. This configuration facilitates easy cleaning and inspection of the pellicle frame and minimizes particle generation during the processing of the filter material. Additionally, it provides a sufficient buffering effect to protect the membrane from pressure changes within the internal space of the pellicle frame, thereby preventing damage to the membrane.