Pellicle Frame Segmentation for Rigidity and Exposure Area
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Solution Overview
Problem
Existing pellicle frames with minimized side bar widths suffer from low rigidity, leading to deformation and handling issues, making them impractical for use in manufacturing and transportation, and limiting the available light exposure area.
Innovation Solution
A pellicle frame with a double structure consisting of an inner frame holding the membrane and mask agglutinant layer, and an outer frame providing additional rigidity, which is detachable after adhesion to the photomask, allowing for a slack-free and deformation-free operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the side bar widths of the pellicle frame are minimized to increase light exposure area, then the light exposure area is improved, but the rigidity of the frame deteriorates causing deformation and handling issues
Solution Approach 1:
The pellicle frame is divided into two separate components: an inner frame that holds the membrane and mask agglutinant layer, and an outer frame that provides additional rigidity. The outer frame is detachably connected to the inner frame, allowing the side bars to be minimized for maximum light exposure while the outer frame compensates for the lost rigidity during manufacturing and transportation.
2Area of stationary object
If the side bar widths are reduced to maximize photomask area, then the photomask area is improved, but the frame becomes too flexible causing membrane slacking and rippling
Solution Approach 1:
By segmenting the frame into inner and outer detachable components, the inner frame can have minimized side bars to maximize photomask area, while the outer frame provides the necessary structural support to prevent membrane slacking and rippling during handling and transportation.
Solution Approach 2:
The outer frame is attached during manufacturing and transportation to provide rigidity, then detached before use to maximize the photomask area. The outer frame is discarded from the operational configuration but recovered during logistics to protect the membrane stability.
3Area of stationary object
If a single frame structure is used with minimized side bars, then the light exposure area is improved, but the frame cannot withstand practical use during manufacturing and transportation
Solution Approach 1:
The frame is segmented into detachable inner and outer components. The outer frame acts as a protective casing during manufacturing and transportation that can be easily attached and detached, making the pellicle easier to handle and protect without compromising the minimized side bar design for light exposure.
Solution Approach 2:
The outer frame serves as an intermediary protective structure that facilitates safe transportation and handling of the delicate inner frame with minimized side bars. It mediates between the need for small frame size and the need for handling robustness.
Data Source
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AI summary
A pellicle is proposed in which the frame is composed of a detachable double structure of an inner frame and an outer frame, and the pellicle membrane is adhered only to the inner frame and the photomask-agglutination layer is laid only to the inner frame, and the outer frame is removed from the inner frame after the pellicle is agglutinated to the photomask.