Stainless Steel Pellicle Frame with Interference Coating
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Solution Overview
Problem
Conventional pellicle frames for large flat panel displays face challenges in achieving high dimensional accuracy, flatness, and sufficient rigidity while maintaining strength, and the manufacturing process is complex and costly, especially when integrating reinforcing members and applying surface blackening treatments.
Innovation Solution
A pellicle frame body made of stainless-steel with a transparent oxide coating, where the film thickness of the coating is between 420 nm and 700 nm, providing interference colors that reduce light scattering and facilitate foreign object inspection, and the stainless-steel material offers higher Young's modulus and corrosion resistance, allowing for a thinner and more rigid frame design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the pellicle frame body size is increased to accommodate larger FPD panels, then the coverage area increases, but the dimensional accuracy and flatness deteriorate due to difficulty in maintaining rigidity
Solution Approach 1:
The pellicle frame body uses a composite structure combining aluminum alloy base material with embedded reinforcing members made of materials having higher elastic modulus (such as stainless steel or titanium alloy). This composite construction provides the necessary rigidity for large-sized frames while maintaining dimensional accuracy and flatness throughout the increased area.
2Area of stationary object
If the pellicle frame body size is increased, then the coverage area increases, but the frame deformation increases due to insufficient rigidity against pellicle film tension
Solution Approach 1:
The frame incorporates reinforcing members made of materials with higher elastic modulus than the aluminum alloy base, such as stainless steel or titanium alloy. These reinforcing members are embedded within recesses in the frame body, creating a composite structure that significantly enhances rigidity and resistance to deformation under pellicle film tension while accommodating the increased frame size.
Solution Approach 2:
The reinforcing members are strategically positioned at specific locations within the frame body where structural support is most needed. By concentrating the higher-strength material in critical areas rather than throughout the entire frame, the design achieves enhanced local rigidity to counteract tension forces while maintaining overall frame size.
3Ease of manufacture
If aluminum alloy is used for the pellicle frame body, then the manufacturing cost is reduced, but the Young's modulus and rigidity are insufficient for large-sized frames
Solution Approach 1:
The frame uses a composite construction where the base material remains cost-effective aluminum alloy, but reinforcing members made of higher-strength materials (stainless steel or titanium alloy) are embedded at strategic locations. This approach maintains overall manufacturing cost efficiency while providing the necessary Young's modulus and rigidity for large-sized frames through the localized reinforcement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The stainless-steel pellicle frame body with a transparent oxide coating effectively prevents light scattering and foreign object adhesion, ensuring high dimensional accuracy and rigidity, while simplifying the manufacturing process and reducing costs by using solid-phase welding techniques.
Implementation Method 1
A pellicle frame body made of stainless-steel with a transparent oxide coating, where the film thickness of the coating is between 420 nm and 700 nm, providing interference colors that reduce light scattering
Data Source
AI summary
The present invention provides an FPD pellicle frame body in which external color is controlled so as to make it easy to prevent scattering of exposure light, to perform the foreign object non-adhesion inspection before use, and the like, and a method for manufacturing the frame body efficiently. The FPD pellicle frame body of the present invention comprises: a stainless-steel member having a transparent oxide coating, and a film thickness of the transparent oxide coating being 420 nm to 700 nm. It is preferable that a brightness index L* due to the interference color of the reflected lights from the surface of the transparent oxide coating and the surface of the stainless-steel member is 33 or less.