Pellicle Frame Lifting Tool for Scratch-Free Photomask Removal

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Solution Overview

Problem

Conventional methods for removing pellicles from photomasks are prone to scratching, handling damage, residual glue issues, and lack precision, posing challenges in safely and effectively separating the pellicle frame from the photomask.

Innovation Solution

A pellicle removal tool with adjustable columns and arms, utilizing lead screws for precise vertical and lateral adjustments, and a heating element to assist in adhesive removal, ensuring controlled lifting and minimizing damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a pry bar is used to manually rock and lift the pellicle frame, then the pellicle can be removed from the photomask, but there is a high risk of scratching or handling damage to the photomask plate

Engineering Contradiction:

Improvemanual pellicle removalVSAvoidscratching or handling damage

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a specialized pellicle removal tool as an intermediary device between the operator and the photomask. This tool includes a frame engagement mechanism that interfaces with the pellicle frame's side wells, allowing controlled lifting and removal without direct hand contact with the photomask plate, thereby eliminating scratching risks while maintaining operational ease

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The pellicle removal tool is designed to engage with the pellicle frame's built-in side wells, utilizing the frame's own structural features for grip and leverage. This self-service approach allows the tool to securely hold and manipulate the pellicle frame without requiring additional attachment mechanisms that could potentially damage the photomask

Inventive Principle:

Principle #25Self-service

2Productivity

If manual handling or tools are used to remove the pellicle frame, then the pellicle can be separated, but glue residue remains on the photomask surface requiring additional cleanup

Engineering Contradiction:

Improvepellicle removal speedVSAvoidglue residue

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

The pellicle removal tool is designed to extract not only the pellicle frame but also the adhesive bonding the frame to the photomask. The tool's mechanism pulls the frame away from the plate surface, effectively removing the glue layer along with the frame, leaving a clean photomask surface without residual adhesive that would require additional cleanup operations

Inventive Principle:

Principle #2Taking out (Extraction)

3Ease of operation

If the pry bar rocks backward to lift the frame, then the pellicle can be separated, but the pull motion follows an arc that causes loss of grip on the frame

Engineering Contradiction:

Improveframe lifting motionVSAvoidgrip maintenance

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The pellicle removal tool segments the lifting action into controlled vertical movements rather than a continuous rocking arc. The tool's engagement mechanism maintains a stable, linear pull direction that keeps the force vector consistent throughout the removal process, preventing the grip loss that occurs when the pry bar rocks backward along an arc

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The tool incorporates adjustable arms that can adapt their position and angle during the removal process. This dynamic adjustment capability allows the tool to maintain optimal engagement with the pellicle frame's side wells throughout the lifting motion, ensuring continuous secure grip even as the frame moves away from the photomask surface

Inventive Principle:

Principle #15Dynamics

4Device complexity

If conventional manual methods are used, then simple tools are required, but precision and control in pellicle removal are insufficient

Engineering Contradiction:

Improvetool structureVSAvoidpellicle removal precision

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The pellicle removal tool combines multiple functions in a single device: frame engagement via side well insertion, controlled vertical lifting through adjustable arms, and adhesive removal capability. This multi-functional design achieves high precision pellicle removal without requiring an overly complex structure, as each component serves a specific purpose in the removal process

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent replaces the imprecise rocking motion of a conventional pry bar with a controlled mechanical lifting system. The adjustable arms and engagement mechanism provide precise control over the lifting force and direction, enabling accurate pellicle removal while maintaining relatively simple tool architecture through efficient mechanical design

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS11948824B2Pellicle removal tool

Publication Date: 2024.04.02 PHOTRONICS INC

AI summary

A pellicle removal tool including a stage that holds a photomask and an associated pellicle, two or more arms positioned around the stage and configured to engage pellicle side wells of the pellicle, and two or more actuators each configured to adjust at least a vertical position of a corresponding one of the two or more arms so as to apply a lifting force to the pellicle for removal of the pellicle from the photomask.