Pellicle Frame Multi-Jig Handling Contamination
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Solution Overview
Problem
Conventional pellicle frames are prone to contamination during the exchange and handling of pellicle manufacturing steps due to limited jig holes, allowing contact with foreign matter and subsequent particle adherence.
Innovation Solution
The pellicle frame design is enhanced by adding additional jig holes on each side bar, allowing for simultaneous grasping by multiple handling jigs, thereby minimizing contact with foreign matter and reducing contamination risks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional pellicle frames with limited jig holes are used, then the frame structure remains simple, but contamination occurs during handling and exchange of pellicle manufacturing steps
Solution Approach 1:
The frame is segmented into multiple regions with dedicated jig holes positioned at specific locations (four corners and midpoints of sides). This segmentation allows independent handling at different points without cross-contamination, as each handling point can be independently controlled by separate handling jigs.
Solution Approach 2:
The frame design incorporates multiple jig holes that serve universal handling functions across different manufacturing steps. The same set of strategically positioned holes enables various operations (mounting, handling, exchange) without requiring different specialized features, thereby preventing contamination while maintaining operational versatility.
2Reliability
If multiple jig holes are added to the frame, then contamination during handling is reduced, but the manufacturing process becomes more complex
Solution Approach 1:
The jig holes are pre-formed during the frame fabrication process itself, rather than being added as separate post-processing steps. This preliminary action integrates the contamination-prevention feature into the standard manufacturing workflow, avoiding additional complexity while ensuring proper positioning and cleanliness of handling points.
Data Source
AI summary
There is provided a pellicle which comprises a pellicle frame having eight or more jig holes in the outer wall for receiving jig pins of pellicle handling jigs; the jig holes are arranged such that the pellicle frame can be held by two or more pellicle handling jigs at the same time, and preferably the jigs holes are on the outer walls of the all frame bars so that the pellicle frame can be held by the jigs at both the longer frame bars and the shorter frame bars at the same time.