Pellicle Frame Polyimide Film Ion Outgassing
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Solution Overview
Problem
Existing pellicle frames used in semiconductor manufacturing are prone to degradation by short-wavelength light and outgassing of ions, leading to reduced patterning precision and contamination, with previous coatings like acrylic and fluororesin having low film strength or being susceptible to light degradation.
Innovation Solution
A pellicle frame with a polyimide resin-containing film electrodeposited on an aluminum alloy frame, which is anodized and blackened, providing high light and heat resistance and strong adhesion to the frame, reducing ion elution and dust generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If anodizing treatment is applied to the aluminum alloy frame, then surface protection is improved, but residual ions remain that cause outgassing and foreign particle generation
Solution Approach 1:
The patent extracts and removes residual ions from the anodized frame surface through chemical treatment processes, specifically using chelating agents to bind and remove metal ions that would otherwise outgas or form foreign particles during semiconductor manufacturing
Solution Approach 2:
The patent applies a multi-layer coating system consisting of multiple sequential coatings (including acrylic resin, fluororesin, and silane-based coatings) on the anodized frame, creating a composite structure that provides both surface protection and ion barrier functionality
2Strength
If acrylic resin coating is electrodeposited on the frame, then film strength is improved, but the coating is easily peeled during pellicle adhesion or transportation
Solution Approach 1:
The patent uses a multi-layer composite coating system where an acrylic resin base coating provides film strength, while additional layers (fluororesin and silane-based coatings) are applied sequentially to enhance adhesion stability and prevent peeling during pellicle adhesion and transportation
Solution Approach 2:
Different regions of the coating system have specialized functions: the base acrylic resin layer provides overall film strength, while the outer fluororesin and silane layers provide localized adhesion enhancement and chemical resistance at the coating-frame interface
3Object-generated harmful factors
If fluororesin coating is applied on the frame, then dust generation is reduced, but the coating degrades under short-wavelength light irradiation
Solution Approach 1:
The patent combines fluororesin coating with silane-based coatings and other protective layers to create a composite structure where the fluororesin reduces dust generation while the silane and other layers provide UV and short-wavelength light resistance, preventing degradation
Solution Approach 2:
The silane-based coating acts as an intermediary layer between the fluororesin and the environment, providing chemical bonds that enhance durability and protect the fluororesin from light-induced degradation while maintaining its low dust generation properties
4Strength
If epoxy resin coating is electrodeposited on the frame, then film strength is improved, but the coating degrades when exposed to short-wavelength light
Solution Approach 1:
The patent uses epoxy resin as a base coating to provide film strength, then applies additional layers including fluororesin and silane-based coatings that provide resistance to short-wavelength light, creating a composite structure where each layer compensates for the weaknesses of the others
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The polyimide resin film enhances the pellicle frame's resistance to short-wavelength light, reduces ion outgassing, and maintains strong adhesion, ensuring high precision and cleanliness during semiconductor manufacturing processes.
Implementation Method 1
anodizing treatment
Implementation Method 2
coating with a polyimide resin-containing coating material the aluminum alloy frame subjected to the blackening treatment, to form a polyimide resin-containing film
Data Source
Figure 1
AI summary
The purpose of the present invention is to provide: a pellicle frame which is not susceptible to deterioration even if irradiated with short-wavelength light such as excimer light, and which is not susceptible to generation of an outgas or foreign substance; and a pellicle which uses this pellicle frame. In order to achieve the above-described purpose, this pellicle frame for supporting the outer periphery of a pellicle film is configured to comprise a frame and a film that is formed on the surface of the frame and contains a polyimide resin.