Pellicle Frame Lifting Tool for Scratch-Free Photomask Removal

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Solution Overview

Problem

Conventional methods for removing pellicles from photomasks are prone to scratching, handling damage, and leave adhesive residue, requiring manual dexterity and risk of re-sticking.

Innovation Solution

A pellicle removal tool with adjustable arms and actuators that engage pellicle side wells, allowing for controlled lifting and separation of the pellicle from the photomask, optionally with a heating element to assist adhesive removal.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a pry bar is used to manually rock and lift the pellicle frame, then the pellicle can be removed from the photomask, but there is a high risk of scratching or handling damage to the photomask plate

Engineering Contradiction:

Improverisk of damage to photomaskVSAvoidmanual operation complexity

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The patent introduces a specialized pellicle removal tool as an intermediary device between the operator and the photomask. This tool includes a frame engagement mechanism that interfaces with the pellicle frame corners, providing controlled lifting and separation without direct manual contact with the photomask plate, thereby eliminating scratching risk while simplifying the operation into a single automated motion.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the manual mechanical rocking motion of a pry bar with a controlled mechanical lifting system. The tool employs actuators or mechanical linkages that provide precise vertical and lateral motion control, substituting the unpredictable arc motion of manual pry bar operation with a controlled single-stroke lifting mechanism that reliably removes the pellicle frame without damage.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If manual removal techniques are used, then the pellicle can be lifted off, but adhesive residue is left on the surface requiring additional cleanup

Engineering Contradiction:

Improveadhesive residue removalVSAvoidprocess efficiency

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The patent incorporates a heating element that applies thermal energy to the photomask plate before and during the pellicle removal process. This preliminary heating action softens and loosens the adhesive bonding the pellicle frame to the plate, enabling complete adhesive removal without residue and eliminating the need for additional cleanup steps, thereby maintaining high process efficiency.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent changes the temperature parameter of the photomask plate by applying heat through a heating element. This parameter change softens the adhesive material, transforming it from a rigid bonded state to a more pliable state that can be completely removed without residue, thereby improving both adhesive removal reliability and overall process efficiency by eliminating cleanup operations.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If the pry bar is rocked backwards to lift the frame, then the pellicle can be separated, but the tool requires a relatively high amount of arc range and has maximum penetration at rest point only

Engineering Contradiction:

Improvepellicle separation effectivenessVSAvoidtool motion range requirements

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent inverts the conventional pry bar approach by using a lifting motion instead of a rocking motion. Rather than rocking the tool backwards to create leverage, the pellicle removal tool engages the frame corners and applies direct vertical lifting force, eliminating the need for large arc range motions and complex rocking mechanisms while achieving effective pellicle separation.

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The patent transitions from a two-dimensional rocking motion (arc range) to a primarily vertical one-dimensional lifting motion. The tool engages the pellicle frame corners and applies force in the vertical dimension, eliminating the need for lateral arc range motion and rest point positioning, thereby simplifying the device mechanics while maintaining effective pellicle separation.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

4Reliability

If the frame is pulled upwards in an arc motion, then the pellicle can be lifted, but there is an eventual loss of grip on the frame and the frame can fall back on the plate and re-stick

Engineering Contradiction:

Improvegrip maintenance on frameVSAvoidoperation control

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The patent introduces a controlled mechanical lifting system as an intermediary between the operator and the pellicle frame. This system maintains continuous grip on the frame corners through controlled vertical motion, preventing the frame from falling back and re-sticking to the plate, while requiring minimal operator control input to execute the single-stroke removal operation.

Inventive Principle:

Principle #24Intermediary (Mediator)

Data Source

PatentUS20250191952A1Pellicle removal tool

Publication Date: 2025.06.12 PHOTRONICS INC

AI summary

A pellicle removal tool including a stage that holds a photomask and an associated pellicle, two or more arms positioned around the stage and configured to engage pellicle side wells of the pellicle, and two or more actuators each configured to adjust at least a vertical position of a corresponding one of the two or more arms so as to apply a lifting force to the pellicle for removal of the pellicle from the photomask.