Pellicle Release Liner Surface Roughness Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing pellicle release liners require excessive force for detachment, leading to potential deformation or damage to the pellicle frame and agglutinant layer, especially when using automounters, and do not provide sufficient releasability.
Innovation Solution
The surface roughness of the release-side face of the release liner is controlled to be between 5-30 micrometers, using a flexible resin film with a suitable parting agent, such as fluorine-modified silicone or silicone, to facilitate easy release without damaging the pellicle.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If a conventional release liner with smooth surface is used, then the liner adheres strongly to the agglutinant layer, but this causes excessive force required for detachment leading to deformation or damage to the pellicle frame and agglutinant layer
Solution Approach 1:
The invention changes the surface roughness parameter of the release liner from smooth (conventional) to specifically controlled roughness of 0.03-0.5 μm. This parameter change reduces the adhesion strength between the liner and agglutinant layer, enabling easy detachment with minimal force that prevents damage to the pellicle frame and agglutinant layer during automated or manual release operations
2Ease of operation
If the surface roughness of the release liner is increased, then the releasability from the agglutinant layer is improved, but this may compromise the protective function and adhesion stability
Solution Approach 1:
The invention optimizes the surface roughness parameter within a specific range of 0.03-0.5 μm, which is sufficient to reduce adhesion for easy release while maintaining the liner's protective function during storage and handling. This controlled parameter change achieves the balance between releasability and protective stability
Solution Approach 2:
The release liner is pre-applied to the agglutinant layer during pellicle manufacturing, providing immediate protection. The preliminary bonding is strong enough for storage and handling but designed to release easily during subsequent operations, achieving both protective function and ease of release
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for stable and high releasability of the pellicle, reducing the force required for manual or automated release, thereby improving the yield of semiconductor devices and liquid crystal displays by preventing damage to the pellicle and agglutinant layer.
Implementation Method 1
a release liner to protect the agglutinant layer... having a sufficient releasability from the agglutinant layer
Data Source
AI summary
There is provided a pellicle having a frame, a membrane and an agglutinant layer (adhesive to bond the pellicle on a photo mask) in which the release liner (detachable sheet) laid to the agglutinant layer for protection thereof is controlled to have a surface roughness of 5-30 micrometers on the side of the liner which is attached to the agglutinant layer, with a result that the releasability of the liner is improved suitably.