Pellicle Thermal Durability Evaluation Using Visible Light
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Solution Overview
Problem
Current methods lack a standardized and cost-effective way to evaluate the thermal durability of pellicles used in extreme ultraviolet (EUV) exposure processes, particularly due to the high cost and technical challenges of using EUV light sources, and require a method to assess pellicle lifespan without damaging expensive EUV lithography equipment.
Innovation Solution
A pellicle thermal durability evaluation device and method that uses light with a wavelength of 193 nm or more, such as ultraviolet light, to irradiate a pellicle seated in a chamber, controlling light intensity and distribution to simulate thermal loads, and includes a temperature measurement module to assess thermal emissivity, allowing for evaluation without direct use of EUV lithography process equipment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If EUV light is used to evaluate pellicle thermal durability, then evaluation accuracy is improved, but equipment cost and complexity increase significantly
Solution Approach 1:
The patent uses visible light (405 nm or 532 nm) as a substitute for EUV light to create a simplified evaluation device. The light source unit emits visible light that passes through the pellicle to heat it, and the temperature measurement module measures the resulting temperature increase. This copying approach allows thermal durability evaluation without requiring expensive EUV lithography equipment, resolving the contradiction between measurement accuracy and device complexity.
Solution Approach 2:
The patent introduces visible light as an intermediary substance to transfer energy to the pellicle for thermal durability evaluation. Instead of directly using EUV light, the system uses visible light (405 nm or 532 nm) that can be easily generated and controlled, serving as a mediator to achieve the heating effect needed for evaluation while avoiding the complexity of EUV equipment.
2Reliability
If EUV light source is used for thermal durability evaluation, then evaluation reliability is improved, but operational cost increases
Solution Approach 1:
The patent employs inexpensive visible light sources (405 nm or 532 nm lasers or LEDs) instead of expensive EUV light sources. These visible light sources are commercially available at low cost and can be easily replaced if needed. The light source unit uses these affordable sources to irradiate the pellicle, enabling reliable thermal durability evaluation without the high operational costs associated with EUV equipment.
3Measurement precision
If light intensity is increased to simulate EUV thermal load, then evaluation accuracy is improved, but pellicle damage risk increases
Solution Approach 1:
The patent employs dynamic control of light irradiation parameters, including pulse width modulation and variable intensity control. The light source unit can adjust the intensity and duration of visible light irradiation based on the specific pellicle being evaluated. This dynamic approach allows the system to apply sufficient thermal load for accurate evaluation while avoiding excessive intensity that could damage the pellicle, thus resolving the contradiction between evaluation accuracy and damage risk.
Solution Approach 2:
The patent implements a feedback mechanism where the temperature measurement module continuously monitors the pellicle temperature during light irradiation. The control unit receives this temperature data and adjusts the light source intensity accordingly, stopping irradiation when the target temperature is reached or when abnormal temperature rise is detected. This feedback control prevents overheating and potential pellicle damage while ensuring accurate thermal durability evaluation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables a simplified, cost-effective evaluation of pellicle thermal durability, improving reliability and preventing equipment damage, while creating an environment similar to actual EUV lithography processes by controlling exposure time and gas introduction.
Implementation Method 1
a light source unit for controlling intensity of light according to a type of the pellicle seated on the pellicle holder to irradiate the pellicle with the light
Implementation Method 2
a temperature measurement module for measuring a temperature of the pellicle seated on the pellicle holder
Data Source
AI summary
Provided is a pellicle thermal durability evaluation device. The pellicle thermal durability evaluation device may comprise: a chamber; a pellicle holder which is disposed in the chamber and on which a pellicle is seated; a durability measurement unit including a temperature measurement module for measuring the temperature of the pellicle seated on the pellicle holder; and a light source unit which irradiates the pellicle by controlling the intensity of light according to the type of the pellicle seated on the pellicle holder.