Pellicle Transfer Roller Mechanism for Uniform Adhesion
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Solution Overview
Problem
The challenge lies in transferring pellicles onto semiconductor devices without causing damage, particularly during photolithography processes, where the increasing short wavelengths of light used in optical lithography require pellicles with high transmittance, mechanical strength, and durability, while maintaining stability and uniformity.
Innovation Solution
A pellicle transfer apparatus and method utilizing a base with a roller unit comprising a lower and upper roller, which compresses and bonds the pellicle to a target plate, allowing the flexible plate to wrap around the rollers, ensuring secure transfer without damage, using a combination of adhesiveness and vacuum pressure to stabilize the process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a pellicle is transferred onto a target plate using conventional methods, then the pellicle can be placed on the photomask, but the pellicle may be damaged or deformed during the transfer process
Solution Approach 1:
A flexible plate is introduced as an intermediary carrier that holds the pellicle during transfer. The flexible plate is bonded to the target plate while the pellicle is transferred from the flexible plate to the target plate, preventing direct handling of the fragile pellicle and thus preventing damage or deformation
Solution Approach 2:
The pellicle is pre-mounted on the flexible plate before the transfer process. This preliminary arrangement allows the pellicle to be handled in a protected state, and the flexible plate serves as a stable carrier that maintains pellicle integrity throughout the transfer operation
2Manufacturing precision
If the flexible plate is compressed by the lower roller to bond the pellicle to the target plate, then uniform adhesion is achieved, but the flexible plate may warp or deform
Solution Approach 1:
The pressing mechanism is made dynamic by using a laterally movable roller unit that can apply compression force selectively. The roller moves laterally across the flexible plate, applying localized compression that achieves uniform adhesion without requiring excessive overall force that would cause warping
Solution Approach 2:
The compression process is segmented into multiple localized applications as the roller moves laterally across different regions of the flexible plate. This segmented approach allows uniform adhesion to be achieved through distributed compression rather than concentrated force, preventing warping
3Productivity
If the roller unit laterally moves across the base to compress the flexible plate, then the pellicle transfer yield is increased, but the device complexity increases
Solution Approach 1:
The roller unit is designed to be self-propelled through lateral movement, eliminating the need for complex external positioning mechanisms. The roller's own rotation and lateral motion enable it to traverse the flexible plate and apply compression uniformly, achieving high transfer yield with a relatively simple mechanism
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables stable and damage-free transfer of pellicles onto target plates, enhancing the yield of pellicle transfer processes by ensuring uniform adhesion and preventing deformation or warping of the flexible plate and pellicle.
Implementation Method 1
the lower roller compresses the flexible plate while the roller unit laterally moves in the first direction across the base to bond the pellicle to the target plate
Data Source
AI summary
A pellicle transfer apparatus includes; a base including supporting a target plate, a pellicle and a flexible plate sequentially stacked on the base, and a roller unit laterally movable in a first direction across the base and including a lower roller extending in a second direction intersecting the first direction, and an upper roller above the lower roller and extending in the second direction, wherein the lower roller compresses the flexible plate while the roller unit laterally moves in the first direction across the base to bond the pellicle to the target plate, as the pellicle is separated from the flexible plate, and the flexible plate moves upward to wrap around the lower roller, and the upper roller contacts the flexible plate as it wraps around the lower roller.