Pellicle Vent Hole and Filter Design for Safe Removal

Solution Overview

Problem

The existing methods for removing pellicles from photomasks are prone to breaking the membrane, leading to debris that can damage the patterned surface and pose health risks during semiconductor manufacturing, and current solutions do not effectively minimize debris generation during the removal process.

Innovation Solution

A method involving a pellicle with a frame and a membrane that includes at least one vent hole and a filter, where the membrane is removed separately from the frame using techniques such as vacuum tools, adhesive removal, or dissolving solutions to reduce the risk of breakage and debris dispersion, followed by the frame's removal using appropriate mechanical or thermal means.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the pellicle is removed from the photomask using conventional methods, then the pellicle can be separated from the photomask, but the membrane is prone to breaking and generating debris that can damage the patterned surface

Engineering Contradiction:

Improvepellicle removal processVSAvoidmembrane breakage and debris generation

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The pellicle assembly is divided into separate components: the frame and the membrane. The frame is designed with a first surface that contacts the photomask and a second surface that contacts the membrane, allowing the frame to be removed from the photomask while the membrane remains attached to the frame. This segmentation prevents membrane breakage during removal operations and eliminates debris generation that would otherwise damage the patterned surface.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The frame acts as an intermediary component between the photomask and the membrane. By designing the frame with specific contact surfaces and attachment mechanisms, it serves as a mediator that allows controlled separation of the pellicle from the photomask without direct manipulation of the fragile membrane, thereby preventing breakage and debris generation.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Reliability

If the membrane is removed separately from the frame, then the risk of membrane breakage is reduced, but the process complexity increases

Engineering Contradiction:

Improvemembrane integrity during removalVSAvoidseparate removal process

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The pellicle assembly is divided into separate components: the frame and the membrane. The frame is designed with a first surface that contacts the photomask and a second surface that contacts the membrane, allowing the frame to be removed from the photomask while the membrane remains attached to the frame. This segmentation prevents membrane breakage during removal operations and eliminates debris generation that would otherwise damage the patterned surface.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The frame is pre-designed with specific geometric features and attachment mechanisms that enable easy separation from the photomask before the membrane removal step. This preliminary preparation simplifies the overall process by ensuring the frame can be removed without damaging the membrane or requiring complex manipulation procedures.

Inventive Principle:

Principle #10Preliminary action

3Strength

If the pellicle frame is designed with specific attachment features, then the attachment strength to photomask is improved, but the removal difficulty increases

Engineering Contradiction:

Improveattachment strengthVSAvoidremoval ease

Core Design Contradiction:

StrengthVSEase of operation

Solution Approach 1:

The attachment mechanism is designed to be dynamic rather than static. The frame includes a first surface with attachment features that provide strong bonding during normal operation, but these same features are designed to be reversible, allowing controlled detachment during removal operations. This dynamic design enables the attachment to adapt between strong bonding and easy removal states.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The frame is segmented into distinct attachment regions with specific geometric features that can be selectively engaged or disengaged. This segmentation allows the frame to maintain strong attachment during operation while enabling controlled removal when needed, balancing attachment strength with removal ease.

Inventive Principle:

Principle #1Segmentation

Data Source

PatentUS20240329517A1Pellicle having vent hole

Publication Date: 2024.10.03 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A pellicle includes a frame having an attachment surface configured to attach to a photomask, wherein the frame comprises a vent hole. The pellicle further includes a filter covering the vent hole, wherein the filter directly contacts an inner surface of the frame, and the filter extends in a direction parallel to the attachment surface. The pellicle further includes a membrane extending over a top surface of the frame.