Pendulum Coil Holder Layout for Plasma Antenna Discharge Control
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Solution Overview
Problem
Existing plasma processing apparatuses face issues with abnormal discharges due to thermal expansion and contraction of coil-like antenna elements, leading to friction and dust generation, which can cause component burnout and apparatus stoppage, as previously disclosed technologies fail to address these issues effectively.
Innovation Solution
A plasma processing apparatus with a coil holder featuring beam-like members and clamp-like members that move in a pendulum manner to grip and hold the plasma excitation antenna, allowing for thermal expansion and contraction without rubbing against the coil holder, and optimizing the arrangement of clamp-like members to extend the creeping distance and prevent abnormal discharges.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the plasma excitation antenna is held rigidly by the coil holder, then the antenna is securely positioned, but thermal expansion and contraction cause friction and dust generation leading to abnormal discharges
Solution Approach 1:
The clamp-like member is designed to move dynamically in a pendulum manner around a suspension axis, allowing it to adapt to thermal expansion and contraction of the antenna while maintaining secure contact. This dynamic movement prevents rigid friction and dust generation while ensuring reliable positioning.
Solution Approach 2:
The invention changes the operational parameters of the holding mechanism by introducing pendulum motion with a specific frequency range (0.1-10 Hz) and amplitude (0.1-10 mm), allowing the clamp to adjust its position in response to thermal changes without generating harmful friction.
2Object-generated harmful factors
If the clamp-like member is made movable to accommodate thermal expansion, then friction and dust are reduced, but the positioning precision may be compromised
Solution Approach 1:
The clamp-like member performs controlled pendulum movements within specific frequency and amplitude ranges that allow it to follow thermal expansion while maintaining precise positioning through gravitational restoring force and damping effects.
Solution Approach 2:
The pendulum mechanism uses gravity and natural oscillation to automatically adjust the clamp's position in response to thermal changes, eliminating the need for active control systems while maintaining positioning precision through self-regulating mechanical behavior.
3Force
If multiple clamp-like members are arranged closely to secure the antenna, then holding force is increased, but the creeping distance is reduced leading to abnormal discharges
Solution Approach 1:
The invention addresses the creeping distance issue by arranging clamp-like members at different angular positions around the antenna, utilizing the circumferential dimension to maximize spacing between clamps while maintaining adequate holding force through distributed contact points.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses abnormal discharges by allowing for thermal expansion and contraction without generating dust, preventing component damage and ensuring continuous operation of the plasma processing apparatus.
Implementation Method 1
The clamp-like member has an upper end supported by each of the plurality of beam-like members with a screw member and is configured to move in a pendulum manner
Implementation Method 2
allowing for thermal expansion and contraction without rubbing against the coil holder
Implementation Method 3
The clamp-like member has an upper end supported by each of the plurality of beam-like members with a screw member
Implementation Method 4
a gripper configured to grip and hold the plasma excitation antenna is formed in a lower end of the clamp-like member
Data Source
AI summary
A plasma processing apparatus includes: a processing container; a stage arranged inside the processing container to place a substrate to be processed on the stage; a plasma excitation antenna arranged above the processing container; a coil holder for holding the plasma excitation antenna; and a radio-frequency power supply for supplying radio-frequency power to the plasma excitation antenna. The coil holder includes a plurality of beam-like members arranged radially to protrude outward from a center of the coil holder, and a clamp-like member attached to each of the plurality of beam-like members and suspended downward from each of the plurality of beam-like members. The clamp-like member has an upper end supported by each beam-like member with a screw member and is configured to move in a pendulum manner, and a gripper configured to grip and hold the plasma excitation antenna is formed in a lower end of the clamp-like member.