Pendulum Substrate Scanning With Dual Rotation for Compact Precision

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Conventional substrate scanning apparatuses are bulky, requiring larger vacuum chambers, which are expensive and inefficient, and cannot achieve the necessary accuracy for precise location-specific processes.

Innovation Solution

A method and system utilizing a rotatable substrate holder attached to the distal end of a pendulum arm, where the pendulum arm is driven by a first rotary drive at its proximal end and a second rotary drive at its distal end, allowing for precise control of a parallel raster pattern on the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional scanning mechanisms are used, then substrate scanning capability is achieved, but the apparatus becomes bulky with larger footprint requiring larger vacuum chambers

Engineering Contradiction:

Improvevacuum chamber sizeVSAvoidpositioning accuracy

Core Design Contradiction:

Volume of moving objectVSManufacturing precision

Solution Approach 1:

The substrate holder is divided into two independent rotational systems: a first rotary drive for rotating the entire substrate holder assembly, and a second rotary drive for rotating the substrate on the holder. This segmentation allows each rotational axis to be controlled independently, achieving precise positioning (e.g., 0.003 inch accuracy) while maintaining a compact overall structure that reduces vacuum chamber size.

Inventive Principle:

Principle #1Segmentation

2Area of stationary object

If conventional scanning mechanisms are used, then substrate scanning is possible, but the apparatus requires larger and more expensive vacuum chambers

Engineering Contradiction:

Improvevacuum chamber footprintVSAvoidscanning flexibility

Core Design Contradiction:

Area of stationary objectVSEase of operation

Solution Approach 1:

The system employs dynamic control of two rotational axes with independent rotary drives. The controller synchronizes the rotation of the substrate holder assembly and the substrate itself to achieve flexible scanning patterns. This dynamic operation allows the compact apparatus to perform complex scanning tasks that would otherwise require larger, more rigid conventional mechanisms.

Inventive Principle:

Principle #15Dynamics

3Volume of moving object

If smaller scanning mechanisms are used, then vacuum chamber size is reduced, but positioning accuracy becomes insufficient for sensitive processes

Engineering Contradiction:

Improvevacuum chamber sizeVSAvoidpositioning accuracy

Core Design Contradiction:

Volume of moving objectVSMeasurement precision

Solution Approach 1:

The controller synchronizes the operation of both rotary drives to maintain precise positioning of the substrate relative to the processing apparatus. By coordinating the rotation of the substrate holder assembly and the substrate itself, the system achieves accurate positioning (0.003 inch or better) within a compact vacuum chamber, resolving the trade-off between size and precision.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables accurate and flexible substrate scanning with reduced chamber size, achieving the necessary precision for location-specific processes while minimizing the footprint and cost of the vacuum chamber.

Implementation Method 1

The first rotary drive is configured to move the pendulum arm in an arc motion centered at the proximal end

Methodology Applied

Scientific EffectArc motion:

Implementation Method 2

The second rotary drive is mounted at the distal end of the pendulum arm and is configured to rotate the substrate holder about a pivot point that is offset from the center of the substrate holder

Methodology Applied

Scientific EffectRotational motion:

Data Source

PatentUS12334348B2Substrate scanning apparatus with pendulum and rotatable substrate holder

Publication Date: 2025.06.17 美国泰尔制造与工程公司

AI summary

A method of scanning a substrate includes immobilizing a substrate on a substrate holder within a processing chamber and performing a pass of a parallel raster pattern by synchronously driving a first rotary drive and a second rotary drive to move the substrate relative to a processing apparatus focused on a localized spot on the substrate, the first rotary drive being coupled to a proximal end of a pendulum arm and the second rotary drive being mounted at a distal end of the pendulum arm and to the substrate holder. Driving the first rotary drive during the pass includes moving the pendulum arm in a first arc motion for a first portion of the pass while the localized spot is on the substrate, and then moving the pendulum arm in an opposite second arc motion for a second portion of the pass while the localized spot is on the substrate.