Perfluoroelastomer Sealing Material Without Inorganic Fillers
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Solution Overview
Problem
Existing sealing materials face challenges in ozone resistance and compression set characteristics under high-temperature environments, particularly when using inorganic fillers that can contaminate devices, and fluoro-rubber compositions with C-H bonds have poorer ozone resistance compared to perfluoroelastomers, while crosslinking agents are difficult to obtain.
Innovation Solution
A perfluoroelastomer composition using TFE-perfluoro(alkyl vinyl ether) or TFE-perfluoro(alkoxyalkyl vinyl ether) copolymers with halogen groups for crosslinking, combined with organic pigments and a peroxide crosslinking system, excluding inorganic fillers, to enhance ozone resistance and compression set characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If inorganic filler is blended to reduce rubber blending amount and maintain ozone resistance, then ozone resistance is improved, but device contamination occurs
Solution Approach 1:
The invention extracts and removes the inorganic filler component from the sealing material composition, achieving ozone resistance through the perfluoroelastomer polymer structure itself rather than through filler additives, thereby eliminating the source of device contamination
Solution Approach 2:
The invention changes the chemical composition parameters by using fully fluorinated polymer structures with specific monomer ratios, achieving ozone resistance through molecular structure design rather than through inorganic filler blending
2Ease of manufacture
If tetrafluoroethylene-propylene-based copolymer is used for sealing material, then ease of manufacture is improved, but ozone resistance deteriorates due to C-H bonds in polymer skeleton
Solution Approach 1:
The invention changes the chemical composition parameters by using fully fluorinated polymer structures with specific monomer ratios, achieving ozone resistance through molecular structure design rather than through inorganic filler blending
Solution Approach 2:
The invention creates a composite perfluoroelastomer composition combining multiple fluorinated monomers (tetrafluoroethylene, perfluoroalkyl vinyl ether, and crosslinking monomers) to achieve both ease of manufacture and superior ozone resistance
3Reliability
If crosslinking agent is added to improve compression set characteristics under high temperature, then compression set characteristics are improved, but difficulty in obtaining materials increases
Solution Approach 1:
The invention uses commonly available, inexpensive crosslinking agents (peroxides, amines, or anhydrides) that are easy to obtain and handle, replacing difficult-to-obtain specialized crosslinking agents, thereby improving ease of manufacture while maintaining compression set characteristics
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The composition achieves good ozone resistance and compression set characteristics under high-temperature environments without inorganic fillers, improving performance in sealing materials for semiconductor and flat panel display manufacturing.
Implementation Method 1
a peroxide crosslinking agent and a co-crosslinking agent... capable of forming a crosslinked product exhibiting good ozone resistance and/or compression set characteristics
Data Source
AI summary
Provided are a perfluoroelastomer composition containing a perfluoroelastomer, a peroxide crosslinking agent, a co-crosslinking agent that is a diolefin compound, and an organic pigment; and a sealing material containing a crosslinked product of the perfluoroelastomer composition.