Perforated Airflow Plate Layout for Clean Substrate Treatment
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Solution Overview
Problem
Conventional substrate treating apparatuses experience airflow congestion and particle formation on substrates due to downward airflow stagnation within the housing, leading to inefficient gas discharge during substrate treatment processes.
Innovation Solution
A substrate treating apparatus is designed with a perforated plate between the treating container and airflow supply unit, featuring a bottom portion with holes for perpendicular gas discharge and an upwardly inclined side portion to direct airflow towards the housing sidewalls, preventing stagnation and ensuring smooth exhaust.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a fan filter unit is installed at a position opposite to the treating container to provide downward airflow, then gas discharge is facilitated, but airflow stagnation occurs near the sidewall of the housing causing particle formation
Solution Approach 1:
The housing side walls are segmented into multiple airflow discharge positions, allowing gas to be discharged at multiple locations rather than a single position. This segmentation prevents airflow stagnation and particle formation while maintaining effective gas discharge throughout the treating space.
Solution Approach 2:
The airflow supply unit is positioned asymmetrically relative to the treating container, specifically at a location not directly opposite the container. This asymmetric positioning, combined with multiple discharge positions on the side walls, eliminates the airflow stagnation problem that occurs with symmetric opposite positioning while maintaining effective gas discharge.
2Reliability
If downward airflow is supplied to the inner space to discharge generated gas, then exhaust efficiency is improved, but airflow congestion occurs leading to particle formation
Solution Approach 1:
The airflow discharge is distributed across multiple dimensions by positioning discharge openings at various locations on the side walls rather than concentrating airflow in a single direction. This multi-dimensional discharge approach eliminates airflow congestion while maintaining effective exhaust of generated gas.
3Productivity
If fan filter unit is positioned opposite treating container, then gas discharge path is established, but airflow stagnation occurs near sidewall
Solution Approach 1:
Different regions of the housing are provided with airflow discharge functions tailored to their specific needs. Multiple discharge positions are strategically located on side walls to ensure uniform airflow distribution throughout the treating space, preventing stagnation in previously problematic areas while maintaining effective gas discharge.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration prevents airflow stagnation and particle formation on substrates, ensuring effective gas discharge and maintaining a clear treatment environment by minimizing airflow interference within the housing.
Implementation Method 1
an airflow supply unit supplying a downward airflow of gas to an inner space
Implementation Method 2
a perforated plate disposed between the treating container and the airflow supply unit and discharging the gas to the inner space
Data Source
AI summary
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having an inner space therein; a treating container disposed within the inner space and having a treating space; a substrate support unit supporting a substrate in the treating space; a liquid supply unit supplying a liquid to the substrate supported by the substrate support unit; an exhaust unit exhausting a fume generated in the treating space; an airflow supply unit coupled to a top side of the housing and supplying a gas to form a downward airflow to the inner space; and a perforated plate disposed between the treating container and the airflow supply unit and discharging the gas to the inner space, and wherein the perforated plate comprises: a bottom portion and a side portion, the side portion comprising a first side portion, and the first side portion extending and upwardly inclining from the bottom portion to a first sidewall of the housing, and having a first hole for discharging the gas.