Perforated WDM Filter Slabs for Thermal Stability

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Solution Overview

Problem

Silicon-based wavelength-division multiplexing filters are sensitive to temperature drift and require complex resistive heaters for thermal tuning, leading to increased operational complexity and power consumption.

Innovation Solution

A structure for a wavelength-division multiplexing filter is designed with a first slab and a second overlapping slab featuring a pixelated pattern of segments and openings, optimized using inverse design software to minimize thermal sensitivity and reduce size, comprising a single-crystal semiconductor material and dielectric layers for improved optical performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If silicon-based wavelength-division multiplexing filters are used, then the filter can be fabricated with standard semiconductor processes, but the filter becomes sensitive to temperature drift requiring complex resistive heaters

Engineering Contradiction:
Improvefabrication compatibilityVSAvoidthermal tuning complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent extracts and removes the resistive heater components from the silicon-based WDM filter structure. By eliminating the heaters entirely and using a different filtering mechanism (based on photonic crystal cavities or resonators), the design achieves temperature insensitivity without requiring thermal tuning components, thus reducing device complexity while maintaining ease of manufacture through standard semiconductor processes

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The filter structure is designed to be inherently insensitive to temperature variations through its geometric and material properties. The photonic crystal resonators or cavities are configured such that their resonant wavelengths remain stable across temperature changes, allowing the filter to self-regulate without external thermal control mechanisms, thereby eliminating the need for complex heater systems

Inventive Principle:
Principle #25Self-service

2Reliability

If resistive heaters are added for thermal tuning, then temperature drift compensation is achieved, but power consumption increases significantly

Engineering Contradiction:
Improvetemperature stabilityVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent removes the resistive heater components from the system entirely. By using photonic crystal resonators or cavities with inherently stable resonant wavelengths that are insensitive to temperature variations, the design achieves temperature compensation without requiring continuous power input, thus eliminating the power consumption penalty associated with active thermal tuning

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The filter structure utilizes passive geometric and material properties to maintain wavelength stability across temperature changes. The photonic crystal resonators are designed with specific lattice constants and material compositions that provide thermal insensitivity, allowing the system to maintain reliability without active power consumption for thermal control

Inventive Principle:
Principle #25Self-service

3Adaptability or versatility

If Mach-Zehnder interferometer modulators are used, then wavelength-division multiplexing functionality is achieved, but the form factor becomes large due to lengthy phase shifters

Engineering Contradiction:
ImproveWDM functionalityVSAvoidfilter size
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The patent divides the filtering function into multiple discrete photonic crystal resonators or cavities, each responsible for a specific wavelength channel. This segmentation allows each resonator to be compact while collectively providing full WDM functionality, replacing the lengthy continuous phase shifters of MZI modulators with multiple small, distributed resonating elements that achieve the same spectral separation in a much smaller footprint

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from the planar, extended phase shifter structure of MZI modulators to a vertical or three-dimensional photonic crystal resonator structure. By using resonators that confine light in three dimensions through periodic dielectric structures, the design achieves wavelength-selective filtering without requiring long propagation paths, thus reducing the lateral footprint while maintaining WDM functionality

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Adaptability or versatility

If Mach-Zehnder interferometer modulators are used, then wavelength-division multiplexing is achieved, but sensitivity to fabrication variations increases

Engineering Contradiction:
ImproveWDM functionalityVSAvoidfabrication sensitivity
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent segments the WDM filtering function into multiple independent photonic crystal resonators, each designed with robust geometric parameters that are less sensitive to fabrication tolerances. By using resonators with higher quality factors and more forgiving design rules compared to MZI phase shifters, the system achieves wavelength-selective functionality while reducing sensitivity to dimensional variations introduced during fabrication

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent optimizes the geometric parameters of the photonic crystal resonators, such as hole radius, lattice constant, and cavity dimensions, to achieve wavelength stability and reduced fabrication sensitivity. By carefully selecting operating points where the resonant wavelengths are less sensitive to parameter variations, the design maintains WDM functionality while improving robustness against manufacturing variations

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution reduces the size and complexity of wavelength-division multiplexing filters, enhances optical performance by minimizing thermal sensitivity, and decreases power consumption by eliminating the need for resistive heaters, while maintaining effective channel separation and bandwidth.

Implementation Method 1

The second slab includes a second perimeter and a plurality of openings distributed inside the second perimeter. The plurality of openings of the second slab penetrate through the second slab.

Methodology Applied
Scientific EffectPhotonic crystal filtering: Photonic Crystal

Data Source

PatentUS11415744B1Perforated wavelength-division multiplexing filters
Publication Date: 2022.08.16 GLOBALFOUNDRIES US INC
  • US11415744B1 patent drawing
  • US11415744B1 patent drawing
  • US11415744B1 patent drawing

AI summary

Structures for a wavelength-division multiplexing filter and methods of forming a structure for a wavelength-division multiplexing filter. The structure includes a first slab having a first perimeter, a first waveguide core coupled to the first slab, and a plurality of second waveguide cores coupled to the first slab. A second slab is positioned to overlap with the first slab. The second slab includes a second perimeter and openings that are distributed inside the second perimeter. The openings of the second slab penetrate through the second slab.