Peripheral Electrode Layout for Accurate Edge Position Detection
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Solution Overview
Problem
Existing detection devices suffer from reduced accuracy in detecting the position of a detection target body on the outer edge side of the detection region due to differences in electrode areas and shapes between the detection and peripheral regions.
Innovation Solution
A detection device with a matrix of first detection electrodes in the detection region and at least one second detection electrode in the peripheral region, utilizing a coordinate calculation circuit to calculate the detection position based on the detection values of both types of electrodes, especially when a first detection electrode is on the outer edge, incorporating correction values to account for electrode shape and position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If detection electrodes in the peripheral region have different areas and shapes from those in the detection region, then the peripheral region can be covered for detection, but the accuracy of the detection position on the outer edge side deteriorates
Solution Approach 1:
The patent applies local quality by assigning different roles and configurations to electrodes in different regions: first detection electrodes in the detection region maintain uniform area and shape for high precision, while second detection electrodes in the peripheral region have different areas and shapes adapted to peripheral detection needs. The coordinate calculation circuit also applies local quality by selecting different calculation methods based on which region the detection target is located in.
Solution Approach 2:
The patent changes parameters dynamically based on detection region. When a detection target is detected on the outer edge side, the coordinate calculation circuit switches to a calculation method that incorporates detection values from both first and second detection electrodes, effectively changing the computational parameters to maintain accuracy across different spatial zones.
2Adaptability or versatility
If the detection electrodes in the peripheral region have different configurations, then peripheral detection is enabled, but the uniformity of detection performance across the detection region deteriorates
Solution Approach 1:
The patent segments the detection system into two distinct parts: first detection electrodes for the detection region and second detection electrodes for the peripheral region. This segmentation allows each part to be optimized independently - the first electrodes maintain uniformity for consistent performance in the detection region, while the second electrodes provide extended peripheral coverage without compromising the uniformity of the primary detection area.
3Measurement precision
If detection is performed using only first detection electrodes in the detection region, then detection precision is maintained, but the detection region cannot be extended to the peripheral region
Solution Approach 1:
The patent merges two types of detection electrodes - first detection electrodes in the detection region and second detection electrodes in the peripheral region - into a unified detection system. The coordinate calculation circuit integrates detection values from both electrode types, allowing the system to maintain precision while extending the effective detection area to include the peripheral region.
Data Source
AI summary
A detection device includes a plurality of first detection electrodes disposed in a matrix of rows and columns in a detection region of a substrate, at least one second detection electrode disposed in a peripheral region outside the detection region, positioned adjacent to some of the plurality of the first detection electrodes, and provided along a side of the detection region, and a coordinate calculation circuit configured to calculate a detection position of a detection target body.


