Permeability Evaluation Method for Semiconductor Insulators

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Current methods for evaluating the permeability of heavy metal ions through insulating materials in semiconductor production are complex, hazardous, and not suitable for steady product testing, particularly due to the use of hazardous chemicals and the need for high cleanliness environments.

Innovation Solution

A permeability evaluation method involving the application of a voltage between two liquids separated by a specimen containing an insulating material, where one liquid contains heavy metal ions and the other contains water and an organic solvent, allowing for the measurement of current or ion concentration to assess permeability without specialized apparatus.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional evaluation methods using fluoric acid are employed to directly confirm gettering ability, then measurement precision is improved, but safety hazards increase and ease of operation deteriorates

Engineering Contradiction:

Improvegettering ability measurementVSAvoidhazardous chemical exposure

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent introduces an intermediary evaluation system using model cells with insulating material layers sandwiched between electrode-containing liquids. This intermediary model allows indirect assessment of gettering ability through electrical conductivity measurements, eliminating direct contact with hazardous fluoric acid while maintaining evaluation effectiveness.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent creates a simplified copy model of the semiconductor manufacturing process using model cells that replicate the essential structure (insulating material between substrates) and function (heavy metal ion barrier) without requiring actual semiconductor wafers, fluoric acid contamination, or high cleanliness environments. This copy enables steady evaluation for product testing.

Inventive Principle:

Principle #26Copying

2Measurement precision

If conventional evaluation methods with complex procedures are used, then measurement precision is improved, but productivity decreases and time consumption increases

Engineering Contradiction:

Improveheavy metal permeability evaluationVSAvoidevaluation speed

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The patent replaces complex mechanical and chemical procedures with an electrical measurement system. Instead of using fluoric acid to contaminate surfaces and then measuring heavy metal content through complex chemical analysis, the invention uses electrical conductivity measurements to rapidly assess the insulating material's barrier properties, significantly reducing evaluation time while maintaining precision.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If conventional evaluation methods requiring high cleanliness environments are employed, then measurement precision is improved, but device complexity and operational difficulty increase

Engineering Contradiction:

Improveheavy metal ion measurementVSAvoidevaluation process simplicity

Core Design Contradiction:

Measurement precisionVSEase of operation

Solution Approach 1:

The patent uses disposable model cells with insulating material samples that can be prepared and evaluated without requiring high cleanliness environments. The model cells are simple, inexpensive structures that can be handled in ordinary laboratory conditions, making the evaluation process accessible and easy to perform while maintaining measurement precision.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables quick and easy evaluation of heavy metal ion permeability and getterability, suitable for product testing, without the need for hazardous chemicals or specialized equipment, and can be applied to various insulating materials used in semiconductor production.

Implementation Method 1

evaluating the permeability of heavy metal ions through a specimen containing an insulating material

Methodology Applied

Scientific EffectPermeation resistance: Semipermeable Membrane

Implementation Method 2

applying a voltage between a positive electrode provided on the side of the first liquid and a negative electrode provided on the side of the second liquid

Methodology Applied

Scientific EffectElectrophoresis: Electrophoresis

Data Source

PatentUS10598622B2Permeability evaluation method

Publication Date: 2020.03.24 RESONAC CORP

AI summary

A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising a step of, in a state in which a first liquid containing heavy metal ions and a second liquid containing water and an organic solvent are separated by a specimen, applying a voltage between a positive electrode provided on the side of the first liquid and a negative electrode provided on the side of the second liquid and measuring the value of the current flowing between the positive electrode and the negative electrode, wherein the specimen contains an insulating material used in semiconductor production, and the heavy metal ion concentration of the first liquid is 0.5 mg/kg or more.