Dual-Zone Permeable Substrate Coating for Barrier Films

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Solution Overview

Problem

Current methods for producing ultra-barrier coatings on permeable polymer films, such as those used in organic electronics, are complex and slow, making them unsuitable for mass production, despite achieving the best barrier effects to date with atomic layer deposition (ALD) techniques.

Innovation Solution

A method involving a chemical reaction between two reactants supplied from opposite sides of a permeable substrate, where one reactant penetrates to react on the surface or within the substrate, forming clusters that grow into a layer, allowing for faster and more cost-effective production of barrier coatings without the need for complex sequential deposition processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If atomic layer deposition (ALD) is used to produce ultra-barrier coatings, then barrier properties are improved, but production speed and complexity worsen

Engineering Contradiction:
Improvebarrier propertiesVSAvoidproduction speed
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The coating process is divided into two separate zones (first and second zones) with different atmospheres, allowing simultaneous deposition of multiple layers without sequential evacuation and refilling steps. This segmentation of the reaction chamber into distinct functional zones enables parallel processing while maintaining the quality of ultra-barrier coatings.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple coating functions are merged into a single continuous process by introducing a second reactant zone that operates simultaneously with the first zone. The substrate passes through both zones in sequence without requiring intermediate evacuation, combining what were previously separate deposition steps into one continuous operation, thereby increasing production speed while maintaining barrier properties.

Inventive Principle:
Principle #5Merging (Combining)

2Manufacturing precision

If conventional ALD processes are used, then coating quality is improved, but process complexity and time increase

Engineering Contradiction:
Improvecoating qualityVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The reaction chamber is segmented into distinct zones with specific functions: the first zone for initial coating deposition and the second zone for additional layer formation. This spatial segmentation allows each zone to be optimized for its specific function while operating simultaneously, reducing the overall process complexity compared to sequential operations.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The process maintains continuous operation by eliminating evacuation and refilling steps between coating steps. The substrate continuously moves through the first and second zones where coating occurs without interruption, maintaining continuous useful action throughout the process rather than alternating between deposition and preparation phases.

Inventive Principle:
Principle #20Continuity of useful action

3Productivity

If spatial ALD is used to increase speed, then productivity improves, but scalability to industrial scale remains challenging

Engineering Contradiction:
Improveproduction speedVSAvoidscalability
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The reaction chamber is divided into two distinct zones that can be independently controlled and optimized. This segmentation allows the system to handle wide and thin foil webs by providing sufficient reaction space in each zone while maintaining the high production speeds characteristic of spatial ALD methods.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The dual-zone configuration provides multi-functionality: the first zone performs initial coating deposition while the second zone performs additional layer formation. This universal design can accommodate various substrate widths and thicknesses, making the system scalable to industrial production while maintaining high productivity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables the production of high-quality barrier coatings more efficiently and quickly than existing ALD techniques, suitable for industrial-scale production, particularly for wide and thin film webs, with reduced complexity and reagent use, and improved mechanical stability against substrate deformation.

Implementation Method 1

a substrate which is permeable to at least one of the reactants; wherein the at least two reactants are supplied from opposite sides of the substrate; wherein the at least one reactant for which the substrate is permeable penetrates through the substrate to the other reactant

Methodology Applied
Scientific EffectDiffusion: Diffusion

Data Source

PatentEP3643809A1Method for forming a layer or individual clusters of a material in and / or on a substrate
Publication Date: 2020.04.29 FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
  • EP3643809A1 patent drawingFigure 1~3
  • EP3643809A1 patent drawingFigure 4~5
  • EP3643809A1 patent drawingFigure 6~8

AI summary

In a process for forming a layer (4) or individual clusters (3) of a material by chemical reaction of at least two reactants on and/or under a surface of a substrate (1) that is permeable to one of the reactants, the at least two reactants are supplied from opposite sides of the substrate surface. This enables the coating of permeable materials, such as polymer films, in a particularly simple manner and with minimal energy input, especially for the production of barrier coatings on an industrial scale.