Perovskite Single Crystal Formation via ALD Segmentation

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Solution Overview

Problem

Current methods for manufacturing Perovskite materials, such as Czochralski and powder sintering, result in poor crystallinity and inferior interface quality, limiting their performance in modern electronic devices due to high growth temperatures and polycrystalline formation, which are incompatible with large commercial substrates.

Innovation Solution

A method involving atomic layer deposition (ALD) of alternately stacked metal oxide layers, followed by post-deposition annealing, to form high-quality Perovskite-type single crystals on substrates, ensuring stoichiometric composition and improved crystallinity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If Czochralski method is used to manufacture Perovskite materials, then single crystal structure is achieved, but very high growth temperature is required and area is limited to very small size

Engineering Contradiction:
ImprovecrystallinityVSAvoidgrowth temperature
Core Design Contradiction:
Manufacturing precisionVSTemperature

Solution Approach 1:

The Perovskite crystal is segmented into alternating metal oxide layers (e.g., SrO and TiO2 layers) that are deposited separately and then annealed together to form the single crystal Perovskite structure. This segmentation allows low-temperature deposition followed by controlled annealing, avoiding the need for very high growth temperatures required by conventional Czochralski method.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The metal oxide layers are deposited in advance with precise thickness control using atomic layer deposition (ALD) before the annealing process. This preliminary deposition establishes the stoichiometric composition and layered structure needed for Perovskite formation, enabling subsequent low-temperature single crystal growth that would otherwise require very high temperatures.

Inventive Principle:
Principle #10Preliminary action

2Manufacturing precision

If Czochralski method is used to manufacture Perovskite materials, then single crystal structure is achieved, but area is limited to very small size

Engineering Contradiction:
ImprovecrystallinityVSAvoidsubstrate area
Core Design Contradiction:
Manufacturing precisionVSArea of stationary object

Solution Approach 1:

The atomic layer deposition method used to deposit the metal oxide layers is a universal low-temperature technique that can be applied to large-area commercial substrates, unlike the Czochralski method which is limited to very small areas. This enables scalable manufacturing of Perovskite single crystals on commercially available substrate sizes.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The deposition temperature parameter is changed from very high temperatures (Czochralski method) to low temperatures (ALD process), enabling deposition on large-area substrates that cannot withstand high temperatures. The subsequent annealing process then transforms these low-temperature deposited layers into a single crystal Perovskite structure.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If powder sintering is used to manufacture Perovskite materials, then manufacturing cost is reduced, but polycrystalline structure is formed with inferior properties

Engineering Contradiction:
Improvemanufacturing costVSAvoidcrystallinity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The Perovskite structure is formed by segmenting it into alternating metal oxide layers that can be deposited and controlled separately. This layered approach, followed by annealing, produces a single crystal structure with superior properties compared to polycrystalline materials from powder sintering, while maintaining ease of manufacture through low-cost ALD and annealing processes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The method uses composite metal oxide layers (e.g., SrO and TiO2) as precursors that are combined through annealing to form the final Perovskite single crystal. This composite layering approach enables precise compositional control and single crystal formation at lower costs compared to traditional high-temperature single crystal growth methods.

Inventive Principle:
Principle #40Composite materials

4Ease of manufacture

If spin coating is used to manufacture Perovskite materials, then manufacturing cost is reduced, but poor crystallinity with grain boundaries and defects is formed

Engineering Contradiction:
Improvemanufacturing costVSAvoidcrystallinity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The Perovskite material is segmented into alternating metal oxide layers deposited by spin coating, followed by annealing to form the single crystal structure. This segmentation into controllable layers eliminates the grain boundaries and defects inherent in conventional spin-coated Perovskite films, achieving superior crystallinity while maintaining low manufacturing cost.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The annealing temperature and atmosphere parameters are optimized to transform the spin-coated metal oxide layers into a single crystal Perovskite structure. This parameter control during annealing eliminates grain boundaries and defects that characterize conventional spin-coated Perovskite materials, achieving high crystallinity at low cost.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the formation of high-quality Perovskite single crystals with excellent crystallinity, uniformity, and interface stability, compatible with commercial electronics manufacturing, enhancing the performance of devices like solar cells and transistors.

Implementation Method 1

forming a material having a Perovskite single crystal structure by annealing the plurality of first layers and the plurality of second layers

Methodology Applied
Scientific EffectAnnealing: Annealing

Implementation Method 2

forming a material having a Perovskite single crystal structure by annealing the plurality of first layers and the plurality of second layers

Methodology Applied
Scientific EffectCrystallisation: Crystallisation

Implementation Method 3

A method includes alternately growing, on a substrate, each of a plurality of first layers and each of a plurality of second layers

Methodology Applied
Scientific EffectAtomic layer deposition: Chemical Vapour Deposition

Data Source

PatentUS11615955B2Material having single crystal perovskite, device including the same, and manufacturing method thereof
Publication Date: 2023.03.28 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11615955B2 patent drawing
  • US11615955B2 patent drawing
  • US11615955B2 patent drawing

AI summary

A method for forming a material having a Perovskite single crystal structure includes alternately growing, on a substrate, each of a plurality of first layers and each of a plurality of second layers having compositions different from the plurality of first layers and forming a material having a Perovskite single crystal structure by annealing the plurality of first layers and the plurality of second layers.