Perovskite Film Deposition via Close Space Sublimation

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Solution Overview

Problem

Current methods for depositing perovskite films, such as CsPbBr3, face challenges in achieving high-quality, defect-free films with controlled thickness and stoichiometry, particularly for large-area and portable applications, due to high costs and inefficiencies in solution processing and physical vapor deposition techniques.

Innovation Solution

A single-step close space sublimation (CSS) process using crystals or powders as source material, where the substrate and source material are in near-thermal equilibrium, allowing for the deposition of films with controlled thickness and stoichiometry, and potentially mixed halide systems to tune optical and electrical properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If solution processing methods are used to deposit perovskite films, then the process is cost-effective and scalable, but the films suffer from defects and poor stoichiometry control

Engineering Contradiction:
Improvecost-effectiveness and scalabilityVSAvoidfilm stoichiometry and defect control
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The invention utilizes sublimation, a phase transition from solid to vapor, to deposit perovskite films. The source material (cesium halide and lead halide) is heated to sublime and form a vapor that condenses on the cooler substrate, creating high-quality films with controlled stoichiometry and reduced defects while maintaining scalability

Inventive Principle:
Principle #36Phase transitions

Solution Approach 2:

The invention controls film quality by precisely managing temperature parameters - heating the source material to sublimation temperature while maintaining the substrate at a lower temperature for condensation. This parameter control enables stoichiometric accuracy and defect reduction while keeping the process scalable

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If physical vapor deposition techniques are used to deposit perovskite films, then film quality and stoichiometry are improved, but the process becomes complex and less scalable

Engineering Contradiction:
Improvefilm stoichiometry and qualityVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The invention combines multiple deposition steps into a single sublimation process. Both cesium halide and lead halide are loaded together in the source, sublimed simultaneously, and deposited in one continuous operation, simplifying the equipment and process while maintaining high film quality and stoichiometry

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The sublimation process is self-regulating through the temperature gradient between source and substrate. The vapor naturally forms and condenses based on the temperature difference, eliminating the need for complex control systems, pumps, or multiple processing chambers while achieving precise stoichiometry

Inventive Principle:
Principle #25Self-service

3Reliability

If thick films are deposited to achieve sufficient material for neutron detection, then detection efficiency is improved, but solution processing results in poor material utilization and defects

Engineering Contradiction:
Improveneutron detection efficiencyVSAvoidmaterial utilization efficiency
Core Design Contradiction:
ReliabilityVSLoss of substance

Solution Approach 1:

The sublimation process efficiently transfers material from source to substrate through vapor-phase transport. This phase transition enables complete utilization of the source material with minimal waste, while the controlled condensation forms thick, defect-free films suitable for neutron detection applications

Inventive Principle:
Principle #36Phase transitions

Solution Approach 2:

The invention replaces mechanical solution-based deposition with a thermal field-based sublimation process. This substitution eliminates the need for solvents, spin-coating, and thermal annealing steps, directly forming dense, defect-free thick films with superior material utilization

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The CSS process results in high-quality, defect-reduced films with large grain sizes and high material utilization, suitable for applications like neutron detection, offering a cost-effective and scalable solution for thick film deposition with improved electronic properties.

Implementation Method 1

performing a CSS process to deposit the film of the source material on the substrate by simultaneously heating the source material with the first heater to a first temperature and heating the substrate with the second heater to a second temperature

Methodology Applied
Scientific EffectSublimation: Sublimation

Implementation Method 2

performing a CSS process to deposit the film of the source material on the substrate by simultaneously heating the source material with the first heater to a first temperature and heating the substrate with the second heater to a second temperature

Methodology Applied
Scientific EffectCondensation: Condensation

Implementation Method 3

heating the source material with the first heater to a first temperature

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 4

heating the substrate with the second heater to a second temperature

Methodology Applied
Scientific EffectHeating: Heating

Data Source

PatentUS20230349068A1Methods of depositing films with the same stoichiometric features as the source material
Publication Date: 2023.11.02 BOARD OF RGT THE UNIV OF TEXAS SYST
  • US20230349068A1 patent drawing
  • US20230349068A1 patent drawing
  • US20230349068A1 patent drawing

AI summary

Methods for depositing films using crystals or powders as a source material are provided. The films can have a thickness of at least 100 nanometers and can be inorganic (e.g., inorganic perovskite) films, and the source material can be the same composition and/or stoichiometry as the deposited film. The deposition process can be a single-step thermal process using a close space sublimation (CSS) process.