Perovskite Electrode Assembly With Separation Layer Against Oxidation

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Solution Overview

Problem

Existing electrode arrangements with perovskite or perovskite-derived crystal structures face issues of rapid oxidation upon contact with oxygen-containing compounds, leading to altered properties and impaired functionality, which increases manufacturing costs and reduces efficiency.

Innovation Solution

A separating layer with a lattice-matched structure is applied to the electrode to prevent oxidation, allowing for an epitaxial growth of a functional layer, enabling a thin, cost-effective, and reliable connection to other components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the functional layer is made thick enough to ensure reliable functioning, then reliability is improved, but production costs increase and functional properties such as switching times and energy efficiency deteriorate

Engineering Contradiction:
Improvereliable functioningVSAvoidswitching times
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

A separating layer is introduced between the electrode layer and the functional layer to prevent oxidation of the electrode material. This intermediary layer enables the use of thinner functional layers while maintaining reliable operation, as the separating layer protects the electrode interface from degradation that would otherwise require thicker functional layers to compensate for.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the chemical environment at the electrode interface by introducing the separating layer, which prevents oxidation. This parameter change (oxidation prevention) allows the functional layer to be made thinner while maintaining reliable electrical contact and functionality, thereby improving switching times and energy efficiency without sacrificing reliability.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the electrode material is used with high conductivity, then electrical conductivity is improved, but oxidation occurs when exposed to oxygen-containing compounds, impairing electrode properties

Engineering Contradiction:
Improveelectrical conductivityVSAvoidoxidation
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The separating layer serves as a protective intermediary between the highly conductive electrode material and the oxygen-containing environment. This layer prevents direct contact between oxygen and the electrode material, thereby preventing oxidation while allowing the electrode to maintain its high conductivity properties.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The harmful oxygen is effectively removed from the interface between the electrode and the functional layer by introducing the separating layer. This extraction of oxygen from the critical interface region prevents oxidation reactions while maintaining the electrical functionality of the device.

Inventive Principle:
Principle #2Taking out (Extraction)

3Productivity

If a thin functional layer is used to reduce material costs and improve performance, then productivity is improved, but reliable connection to the electrode layer becomes difficult

Engineering Contradiction:
Improvematerial efficiencyVSAvoidconnection reliability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The separating layer acts as a protective intermediary that enables thin functional layers to be used without compromising connection reliability. By preventing oxidation at the electrode interface, the separating layer ensures stable electrical contact even when the functional layer is made very thin, thus achieving both material efficiency and reliable connection.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution prevents oxidation, facilitates efficient production, reduces material usage, and enhances the electrode's functionality with low leakage currents and efficient operation, particularly suitable for capacitors and varactors.

Implementation Method 1

the separating layer having the property of preventing changing oxidation of the electrode material in the area of the functional surface

Methodology Applied
Scientific EffectOxidation prevention: Oxidation

Implementation Method 2

Both the layer made of the first electrode material and the separating layer and a functional layer arranged thereon can be produced with the aid of customary epitaxial methods

Methodology Applied
Scientific EffectEpitaxy: Epitaxy

Data Source

PatentEP3414769B1Micro-electronic electrode assembly
Publication Date: 2026.04.29 TECH UNIV DARMSTADT
  • EP3414769B1 patent drawingFigure 1

AI summary

With a micro-electronic electrode assembly (1) having a first electrode (3) arranged on a substrate (2), wherein the first electrode (3) has a thin layer made of a first electrode material having a solid state lattice, wherein the first electrode material oxidises upon contact with oxygen-containing compounds and has a perovskite or perovskite-derived crystal structure, and wherein the electrode (3) has a functional surface (4) facing away from the substrate (2), a separation layer (5) is arranged on the functional surface (4) of the electrode (3), which prevents an oxidation of the electrode material in the region of the functional surface (4), said oxidation changing the properties of the electrode (3). An electrically insulating functional layer (6) is arranged on the separation layer (5) and a second electrode (7) is arranged on the electrically insulating functional layer (6). According to the invention, advantageously, the first electrode material has one of the compounds SrMoO3, SrMoO3-aNa BaMoO3, SrVO3, or Sr2MoO4, and the separation layer (5) has one of the compounds SrTiO3, DyScO3, GdScO3 or SrHfO3. The functional layer (6) is a compound with the molecular formula BaxSr1-xTi1±yO3±z, preferably Ba0.5Sr0.5TiO3. The electrode assembly (1) forms a varactor.