Perovskite PLD Layer Stacking Without Vacuum Breaks

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Solution Overview

Problem

Existing optoelectronic and photovoltaic devices based on perovskite materials suffer from reliability issues and short lifespans due to their inherent drawbacks.

Innovation Solution

A manufacturing process involving the successive steps of forming an active layer with a perovskite material and a second charge transport layer made of an inorganic material using PLD deposition under vacuum conditions, without breaking the vacuum between these steps, to create a vertical stack with aligned crystal structures, enhancing the stability and reliability of the device.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If perovskite-based optoelectronic devices are manufactured using conventional atmospheric pressure deposition, then the manufacturing process is simple and accessible, but the device reliability and lifetime are short

Engineering Contradiction:
Improvedevice lifetimeVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies vacuum environment (inert atmosphere principle) by performing PLD deposition under vacuum conditions without breaking vacuum between steps. This protects the perovskite active layer and charge transport layers from atmospheric contamination, moisture, and oxygen exposure during manufacturing, thereby improving device reliability and lifetime while maintaining a controlled manufacturing process

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

Solution Approach 2:

The patent implements continuous vacuum deposition by not breaking the vacuum between depositing the perovskite active layer and the charge transport layer. This continuous process prevents exposure to atmospheric conditions, ensures clean interfaces between layers, and improves device stability without significantly increasing process complexity

Inventive Principle:
Principle #20Continuity of useful action

2Stability of the object's composition

If the active layer is exposed to atmospheric conditions during manufacturing, then the process is simpler and faster, but the stability and reliability of the perovskite structure deteriorates

Engineering Contradiction:
Improveperovskite structure stabilityVSAvoidmanufacturing cycle time
Core Design Contradiction:
Stability of the object's compositionVSLoss of time

Solution Approach 1:

The patent maintains vacuum environment throughout the deposition process to protect the perovskite structure from atmospheric degradation. This inert environment prevents moisture and oxygen exposure that would otherwise compromise the perovskite composition stability, while the continuous process minimizes time loss

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

3Manufacturing precision

If multiple layers are deposited separately with vacuum breaks, then each layer can be optimized independently, but the interface quality and device performance decrease

Engineering Contradiction:
Improvelayer interface qualityVSAvoidprocess control complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent deposits the perovskite active layer and charge transport layer continuously under vacuum without breaking the vacuum between steps. This continuous deposition creates clean, high-quality interfaces between layers while avoiding contamination that would occur with vacuum breaks, thereby improving manufacturing precision without requiring complex process control

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The process results in optoelectronic or photovoltaic devices with improved stability, extended lifespan, and high internal quantum efficiency, suitable for small pixel applications and integration with integrated circuits at low temperatures, while maintaining high absorption coefficients and tolerance to crystal structure defects.

Implementation Method 1

forming, by PLD deposition, an active layer comprising a perovskite material on the upper face of a first charge transport layer; depositing, by PLD deposition, a second charge transport layer made of an inorganic material on the upper face of the active layer

Methodology Applied
Scientific EffectPulsed Laser Deposition: Pulsed Laser Deposition

Implementation Method 2

steps a) and b) are carried out under vacuum, i.e. at a pressure lower than atmospheric pressure, the process not involving breaking the vacuum between steps a) and b)

Methodology Applied
Scientific EffectVacuum deposition: Physical Vapour Deposition

Implementation Method 3

the active layer and the second charge transport layer have crystalline structures aligned in an epitaxial relationship

Methodology Applied
Scientific EffectEpitaxy: Epitaxy

Data Source

PatentEP4327370B1Process for manufacturing an optoelectronic or photovoltaic device, and device made by said process
Publication Date: 2025.01.01 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP4327370B1 patent drawingFigure 1~2

AI summary

The present description relates to a process for manufacturing an optoelectronic or photovoltaic device, comprising the following consecutive steps: a) forming, by pulsed laser deposition (PLD), an active layer (107) comprising a perovskite material on the upper face of a first charge transport layer (105); b) depositing, by PLD, a second charge transport layer (109) made of an inorganic material on the upper face of the active layer, wherein steps a) and b) are carried out in a vacuum, i.e. at a pressure lower than atmospheric pressure, the process not involving any interruption of the vacuum between steps a) and b).