Perpendicular Magnetic Head Side Shield Formation
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Solution Overview
Problem
Conventional methods for forming side shields in perpendicular magnetic recording type thin-film magnetic heads often result in deformation when the thickness of the side shield gap layer is reduced, leading to discontinuity and the formation of unwanted lower shield layers.
Innovation Solution
A method involving the formation of a resist pattern, a nonmagnetic layer, and a magnetic layer, followed by selective removal and etching with a baked resist layer to ensure the nonmagnetic layer under the magnetic pattern remains continuous, preventing deformation and unwanted shield formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the thickness of the side shield gap layer is reduced, then the recording density is improved, but the nonmagnetic layer becomes discontinuous and unwanted lower shield layers are formed
Solution Approach 1:
A nonmagnetic layer is formed in advance on the under layer before forming the magnetic layer pattern. This preliminary nonmagnetic layer serves as a continuous base layer that prevents unwanted lower shield layer formation, while allowing the side shield gap layer thickness to be reduced for improved recording density.
Solution Approach 2:
The nonmagnetic layer is segmented into two functional parts: a continuous nonmagnetic layer on the under layer that ensures stability and prevents unwanted shield formation, and a side shield gap layer that can be thin to improve recording density. This segmentation allows each layer to fulfill its specific function independently.
2Productivity
If the side shield gap layer thickness is reduced to increase recording density, then higher linear recording density is achieved, but deformation occurs and unwanted lower shield layers are formed
Solution Approach 1:
The continuous nonmagnetic layer is formed on the under layer before creating the side shield structure. This preliminary layer provides structural support and reliability, enabling the side shield gap layer to be made thin without causing deformation or unwanted lower shield layer formation.
Solution Approach 2:
Different regions of the nonmagnetic layer have different thicknesses and functions: the nonmagnetic layer on the under layer is continuous and provides structural stability, while the side shield gap layer is thin to improve recording density. This local quality differentiation resolves the contradiction between thinness and reliability.
3Ease of manufacture
If conventional etching methods are used to form side shields, then the manufacturing process is simple, but unwanted lower shield layers are formed when the gap layer is thin
Solution Approach 1:
A continuous nonmagnetic layer is formed on the under layer before etching the side shields. This preliminary layer acts as a protective barrier during etching, preventing unwanted lower shield layers from forming while maintaining process simplicity and achieving high manufacturing precision.
Solution Approach 2:
The continuous nonmagnetic layer on the under layer serves as an intermediary protective layer between the etching process and the under layer. It mediates the etching process by preventing direct contact with the under layer, thus preventing unwanted lower shield layer formation while allowing the side shields to be formed with high precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the formation of side shield layers of desired shape without deformation, even when the side shield gap layer thickness is reduced, thereby preventing the formation of unwanted lower shield layers.
Implementation Method 1
removing the first nonmagnetic layer from at least a side surface of the magnetic layer pattern by etching with the baked resist layer being left
Data Source
AI summary
A method of forming a magnetic pole section of a perpendicular magnetic recording type thin-film magnetic head and a method of manufacturing a perpendicular magnetic recording type thin-film magnetic head that include forming on an under layer a resist pattern having an opening, forming a first nonmagnetic layer, forming a first magnetic layer forming a magnetic layer pattern, removing the resist pattern and then applying a resist layer onto a first nonmagnetic layer and a magnetic layer pattern, developing or ashing partway the applied resist layer and baking the remaining resist layer, removing the first nonmagnetic layer from at least a side surface of the magnetic layer pattern by etching with the baked resist layer being left, removing all of the resist layer and then forming a second nonmagnetic layer on at least the magnetic layer pattern, and forming a second magnetic layer on the formed second nonmagnetic layer.