Exhaust Gas Processing Device Preheating PFC Gases
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Solution Overview
Problem
Current exhaust gas processing devices using atmospheric pressure plasma struggle to handle high flow rates of PFC gases efficiently, leading to increased energy costs and reduced torch lifetime due to high current demands and heat requirements.
Innovation Solution
An exhaust gas processing device that preheats PFC gases using an electric heater or heat exchanger before subjecting them to atmospheric pressure plasma, reducing the load on the plasma torch and energy consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If atmospheric pressure plasma is used to thermally decompose PFC gases at high temperature, then decomposition effectiveness is improved, but energy consumption and current demand increase dramatically
Solution Approach 1:
The patent applies preliminary action by preheating the PFC exhaust gas using an electric heater before it enters the plasma decomposition zone. This preheating step raises the gas temperature in advance, reducing the energy and current burden on the plasma torch during actual decomposition, thereby lowering overall energy consumption while maintaining decomposition effectiveness.
2Productivity
If high current is applied to plasma torch to handle increased PFC flow rate, then processing capability is improved, but torch lifetime decreases rapidly
Solution Approach 1:
The electric heater performs preliminary heating of the PFC gas, which reduces the current load required from the plasma torch when handling high flow rates. By sharing the thermal processing burden between the heater and plasma, the torch operates under reduced stress, extending its service life while maintaining high processing capability.
Solution Approach 2:
The electric heater acts as an intermediary device that prepares the PFC gas before it reaches the plasma torch. This intermediary preheating step reduces the direct thermal and electrical burden on the plasma torch, allowing it to handle high flow rates without excessive current demand, thus preserving torch lifetime.
3Adaptability or versatility
If multiple types of exhaust gas processing devices are prepared for different gas types, then processing versatility is improved, but device management complexity increases
Solution Approach 1:
The patent implements universality by designing a single integrated exhaust gas processing device that combines electric heating and plasma decomposition capabilities. This unified device can handle multiple types of exhaust gases (PFC, monosilane, chloride gas) through one system, eliminating the need for separate specialized devices for each gas type, thus reducing management complexity while maintaining processing versatility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient processing of high-flow volume PFC gases with reduced plasma generator capacity and energy usage, extending torch lifespan and lowering operational costs.
Implementation Method 1
preheats externally-supplied processing target exhaust gas within a device main body in the presence of moisture with heat from at least either an electric heater or a heat exchanger
Implementation Method 2
thermally decomposing the preheated exhaust gas with an atmospheric pressure plasma
Implementation Method 3
a pyrolysis type exhaust gas processing device disclosed in Patent Literature 1 is used, that is, a device is used which performs decomposition processing by emitting an atmospheric pressure plasma into a reactor
Implementation Method 4
preheats externally-supplied processing target exhaust gas within a device main body in the presence of moisture with heat from at least either an electric heater or a heat exchanger
Data Source
AI summary
An exhaust gas processing device preheats processing target exhaust gas in the presence of moisture with heat from at least either an electric heater or a heat exchanger and subsequently thermally decomposes the exhaust gas with an atmospheric pressure plasma. A device main body has a heating decomposition chamber therein. A plasma generator is installed at a top surface portion of the device main body. A reactor has a cylindrical shape and is installed within the device main body such that an upper end opening thereof is directed toward a plasma emission port of the plasma generator. A moisture supply unit is provided at an inlet side of the device main body. At least either the electric heater or the heat exchanger is disposed in a first space.