pH Sensor Integral Block Cavity Design
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Solution Overview
Problem
Existing pH sensors for semiconductor processing risk contaminating target liquids due to potential leaks of standard liquids or electrode components, necessitating the use of sample liquids for measurement, which can fluctuate the chemical composition of mixed solutions and waste valuable target liquid.
Innovation Solution
A pH measuring device with an integral main body block, a cavity, a supply line, and a target liquid supply valve, where the pH sensor is in contact with the target liquid within the cavity, allowing for precise control of the target liquid amount through a small orifice diameter and flow path, minimizing waste and maintaining the chemical composition of mixed solutions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a pH sensor is used to detect pH by measuring potential difference between standard liquid and target liquid, then pH measurement can be performed, but standard liquid or electrode components may leak and contaminate the target liquid
Solution Approach 1:
The patent extracts the harmful standard liquid and electrode components from direct contact with the target liquid by introducing a separation membrane between the pH sensor and the target liquid. This allows pH measurement to be performed without the risk of contamination from leaking standard liquid or electrode materials.
Solution Approach 2:
A separation membrane is introduced as an intermediary between the pH sensor and the target liquid. This membrane allows ion transport for pH measurement while preventing direct contact between the target liquid and potentially contaminating components, thus resolving the contradiction between measurement capability and contamination prevention.
2Object-affected harmful factors
If sample liquid is extracted for pH measurement to prevent contamination, then target liquid contamination is suppressed, but the amount of target liquid is consumed and chemical composition may fluctuate
Solution Approach 1:
Instead of extracting sample liquid for measurement, the patent extracts the harmful elements (standard liquid and electrode components) from the measurement interface by using a separation membrane. This allows in-situ pH measurement without consuming any target liquid while preventing contamination.
Solution Approach 2:
The separation membrane acts as an intermediary that enables pH measurement without requiring sample extraction. It allows the measurement to proceed with minimal target liquid involvement, thus preventing both contamination and excessive consumption of the target liquid.
3Measurement precision
If a large amount of sample liquid is used for pH measurement, then measurement accuracy may be improved, but the chemical liquid content and content ratio in mixed solution fluctuate largely
Solution Approach 1:
The separation membrane serves as an intermediary that enables accurate pH measurement while requiring only a minimal amount of target liquid. This maintains the chemical composition stability of the mixed solution by preventing significant fluctuations in liquid content and ratios.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device reduces the amount of target liquid used in pH measurements by optimizing the flow path and valve design, minimizing contamination risks and maintaining the chemical composition of mixed solutions, achieving accurate pH readings with minimal liquid consumption.
Implementation Method 1
a sensor configured to detect the pH of the target liquid by measuring a potential difference caused by a pH difference between a standard liquid and the target liquid
Data Source
AI summary
A pH measuring device configured to measure a pH of a target liquid includes a main body block including a cavity, a supply line communicating with the cavity, a first drain line communicating with the cavity, and a target liquid supply valve configured to adjust a supply of the target liquid into the supply line. The main body block has an integral structure in which a pH sensor is supported such that the pH sensor is in contact with the target liquid within the cavity.